Textured surfaces with sophisticated micro/nano structures can provide interesting and advanced functions. In order to promote those unique functions into the practical use, high performance manufacturing technologies are required. Nowadays, elliptical vibration cutting (EVC) is attracting more and more attentions due to its excellent machining performances, especially the advantageous in the precision machining of difficult-to-cut materials. The emphasis on this literature review is the micro/nano machining technology by applying EVC. The development of the EVC technology is simply introduced, and then the advantageousness of EVC in the machining process is explored in detail. As following, the development of different EVC devices are introduced, and the applications of the micro/nano structure fabrication is detailedly expatiated by applying the different types of elliptical vibrators. By controlling the motion of the ultra-precision machine tool itself, the micro/nano structure can be accurately fabricated on various workpiece materials with the reduction of cutting forces, burr generation, tool wear, et al. in EVC process. Moreover, a unique amplitude control sculpturing method, where the depth of cut is arbitrary changed by controlling the vibration amplitude in the machining process, is introduced. By applying the amplitude control sculpturing method, ultra-precision micro/nano structures can be efficiently sculptured especially on the difficult-to-cut materials. Finally, the elliptical vibration texturing process is also explored in the fast micro/nano machining of the simple and regular structures. The EVC technology is expected to promote the development of micro/nano machining process in the actual industrial applications.

Review of micro/nano machining by utilizing elliptical vibration cutting

Micro-milling is a precision manufacturing process with broad applications across the biomedical, electronics, aerospace, and aeronautical industries owing to its versatility, capability, economy, and efficiency in a wide range of materials. In particular, the micro-milling process is highly suitable for very precise and accurate machining of mold prototypes with high aspect ratios in the microdomain, as well as for rapid micro-texturing and micro-patterning, which will have great importance in the near future in bio-implant manufacturing. This is particularly true for machining of typical difficult-to-machine materials commonly found in both the mold and orthopedic implant industries. However, inherent physical process constraints of machining arise as macro-milling is scaled down to the microdomain. This leads to some physical phenomena during micro-milling such as chip formation, size effect, and process instabilities. These dynamic physical process phenomena are introduced and discussed in detail. It is important to remember that these phenomena have multifactor effects during micro-milling, which must be taken into consideration to maximize the performance of the process. The most recent research on the micro-milling process inputs is discussed in detail from a process output perspective to determine how the process as a whole can be improved. Additionally, newly developed processes that combine conventional micro-milling with other technologies, which have great prospects in reducing the issues related to the physical process phenomena, are also introduced. Finally, the major applications of this versatile precision machining process are discussed with important insights into how the application range may be further broadened.

/pdf/precision-micro-milling-process-state-of-the-art-6g6r6nszoz.pdf

Precision micro-milling process: state of the art

Vibration-assisted machining (VAM) is a process in which high-frequency small amplitude vibration is applied on tool or workpiece to improve cutting performance, especially for hard and brittle materials. It has been applied to several machining processes including drilling, turning, grinding, and milling. This paper offers a review for the vibration devices used in VAM process. The history and current status of the vibration devices are presented including the design theory and principles. The developed vibration devices are categorised in two groups, namely resonant and non-resonant modes. Advantages and limitations of these devices are summarized and discussed, including their development trend. In addition, the benefits and applications of vibration-assisted machining are also introduced.

/pdf/review-of-vibration-devices-for-vibration-assisted-machining-ejqw0ye8ns.pdf

Review of vibration devices for vibration-assisted machining

Analyzing and improving surface texture by dual-rotation magnetorheological finishing

In the high speed milling, the tool run-out affects the cutting force greatly and results in pre-matured tool life. To investigate this relationship, an improved instantaneous milling force per tooth is proposed, with inclusion of tool run-out effect. The un-deformed chip thickness considering tool run-out are defined and modeled, according to the geometrical relationships and axial milling ranges per tooth. Meanwhile, instead of the studying the conventional average flank wear, tool wear per tooth is studied for more sensitive correlation with force. Based on milling tests with Inconel 718, the error of the force model prediction is found less than 1% against the experimental data, and the correlation between the axial instantaneous milling force and tool wear per tooth is above 0.9. The results have shown that the proposed model can accurately describe the instantaneous force per tooth including tool run out effect, and the axial force component is a good indication of tool wear condition.

Modeling of the instantaneous milling force per tooth with tool run-out effect in high speed ball-end milling

Surface roughening of ground fused silica processed by atmospheric inductively coupled plasma

Vibration-assisted cutting is an important technology with better performance in manufacturing micro-scaled components, compared with conventional cutting technology. This article first illustrates...

Development of vibration-assisted micro-milling device and effect of vibration parameters on surface quality and exit-burr:

Geometry defect of tools and assembling error (such as tool runout) is inevitable in the machining process and cannot be ignored in micro-milling processing mechanism. Besides, it also impacts the micro-milling force. Therefore, it plays an important role on impacting surface quality in micro-milling. In the present paper, the milling force model is established for the micro-milling process with considering tool runout, undeformed chip thickness, tool slope angle, shear angle, friction angle, and equivalent rake angle. The model for three-directional micro-milling force is proposed. Furthermore, the cutting forces with different tool runouts are analyzed. The formation of the step that is on the surface and found in the experiments is made clear. Titanium alloy is applied in a series of micro-milling experiments to verify the model of micro-milling force with analyzing the step widths of machined groove edges. The micro-milling process is further comprehended though the model. It helps to judge the surface quality that is affected by tool runout though the analysis of variation of milling force.

Modeling and experimental study on the force of micro-milling titanium alloy based on tool runout

In this paper, a five-axis ultra precision machine tool for fabrication of microstructured surfaces is presented. This machine consists of two rotary axes (C&B) and three linear axes (X&Y&Z). High precision aerostatic bearing and torque motor are adopted in C axis (main spindle) and B axis. X axis and Z axis use the hydrostatic guideway and are driven by linear motors. Y axis is driven by torque motor and precision ball screw. This machine is able to realize multiple processing methods, including ultra precision diamond turning, ultra precision milling, fly-cutting, fast tool servo and slow tool servo diamond turning.Furthermore, a large number of experiment researches are carried out. Some typical microstructure surfaces are manufactured, for sinusoidal grid surface, the surface roughness Ra is 11.9nm, which is machined by slow tool servo diamond turning. Micro pyramid array surface is fabricated by using fly-cutting, which performs well both in the profile accuracy and the repeatability. These experiment researches prove that this ultra precision machine is superior in accuracy and system reliability.

Fabrication of Microstructured Surfaces by Five-Axis Ultra Precision Machine Tool

Atmospheric Pressure Plasma Processing (APPP) of silicon-based optics and wafers is a form of chemical etching technology developed in recent years. The material removal rate is comparable to those of conventional mechanical processing methods in precision fabrication. Moreover, there is no mechanical contact or physical loading on the substrate surface, hence no surface or sub-surface damages are induced. Inductively coupled plasma is one realization of APPP. In this work, inductively coupled plasma torch is used to generate plasma and excite etchant particles at atmospheric pressure. These active particles then diffused to the workpiece surface, react with its atoms to form volatile products. The activity and number of particles in plasma are influenced by processing parameters such as input power, distance between nozzle and substrate surface, flow rate of plasma gas argon and precursor gas CF4. These factors have various impacts on material removal rate. Processing experiments are conducted on fused silica to investigate the parameters’ influences on material removal rate. The basic interaction between substrate surface and plasma is illustrated, then the relationships between processing parameters and material removal rate are analyzed. From the experiments some trends are derived. Material removal rate rises with the increase of power and flow rate of CF4, whereas decreases with the increase of processing distance, etc. The etching footprint is proved to be near Gaussian-shaped and believed to have high potential for deterministic surface processing.

Study on the Key Parameters in Etching of Fused Silica Using Atmospheric Inductively Coupled Plasma

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