Günther Koppitsch
ams AG
30 Papers
59 Citations
Günther Koppitsch is an academic researcher from ams AG. The author has contributed to research in topics: Layer (electronics) & Etching (microfabrication). The author has an hindex of 6, co-authored 30 publications.
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Papers
Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications
Martin Sagmeister,Günther Koppitsch,Paul Muellner,Stefan Nevlacsil,Alejandro Maese-Novo,Rainer Hainberger,Dana Seyringer,Jochen Kraft +7 more
- 19 Nov 2018
TL;DR: An overview of the Si3N4 process as a post-processing flow for standard CMOS, some basic photonic building blocks and their properties, and an example for their use in the field of medical applications are given.
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Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications
Rainer Hainberger,Paul Muellner,Stefan Nevlacsil,Alejandro Maese-Novo,Florian Vogelbacher,Moritz Eggeling,Jörg Schotter,Martin Sagmeister,Günther Koppitsch,Jochen Kraft +9 more
- 04 Mar 2019
TL;DR: In this paper, the simulation, design and experimental validation of various PECVD silicon nitride photonic building blocks required for the implementation of a CMOS-compatible photonic integrated circuit technology platform operating in the 850 nm and 600 nm wavelength domain are reported.
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Patent
Method for Producing a Semiconductor Component, and Semiconductor Component
Franz Schrank,Günther Koppitsch,Michael Beutl,Sara Carniello,Jochen Kraft +4 more
- 25 Jun 2009
TL;DR: In this paper, a connection pad is arranged in the insulation layer of an SOI substrate, and a contact hole opening is provided with a metalization on side walls and on the connection pad.
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Compact and High-Resolution 256-Channel Silicon Nitride Based AWG-Spectrometer for OCT on a Chip
Dana Seyringer,Martin Sagmeister,Alejandro Maese-Novo,Moritz Eggeling,Elisabet Rank,J. Edlinger,Paul Muellner,Rainer Hainberger,Wolfgang Drexler,Jochen Kraft,Günther Koppitsch,Gerald Meinhardt,M. Vlaskovic,Horst Zimmermann +13 more
- 09 Jul 2019
TL;DR: The design, simulation, and technological verification of a compact 256-channel, 42-GHz silicon nitride based AWG-spectrometer dedicated to the realization of an on-chip spectral domain optical coherence tomography (SD-OCT) system are presented.
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Design and Optimization of High-Channel Si3N4 Based AWGs for Medical Applications.
Dana Seyringer,Alejandro Maese-Novo,Paul Muellner,Rainer Hainberger,Jochen Kraft,Günther Koppitsch,Gerald Meinhardt,Martin Sagmeister +7 more
- 01 Jan 2018
TL;DR: The simulations showed that, while the standard channel count AWGs feature gut optical properties and are relatively easy to design, increasing the channel counts leads to a rapid increase in the AWG size and this causes the deterioration of optical performance like higher insertion loss and, in particular, higher channel crosstalk.
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