Rapid progress in the synthesis and processing of materials with structure on nanometer length scales has created a demand for greater scientific understanding of thermal transport in nanoscale devices, individual nanostructures, and nanostructured materials. This review emphasizes developments in experiment, theory, and computation that have occurred in the past ten years and summarizes the present status of the field. Interfaces between materials become increasingly important on small length scales. The thermal conductance of many solid–solid interfaces have been studied experimentally but the range of observed interface properties is much smaller than predicted by simple theory. Classical molecular dynamics simulations are emerging as a powerful tool for calculations of thermal conductance and phonon scattering, and may provide for a lively interplay of experiment and theory in the near term. Fundamental issues remain concerning the correct definitions of temperature in nonequilibrium nanoscale systems. Modern Si microelectronics are now firmly in the nanoscale regime—experiments have demonstrated that the close proximity of interfaces and the extremely small volume of heat dissipation strongly modifies thermal transport, thereby aggravating problems of thermal management. Microelectronic devices are too large to yield to atomic-level simulation in the foreseeable future and, therefore, calculations of thermal transport must rely on solutions of the Boltzmann transport equation; microscopic phonon scattering rates needed for predictive models are, even for Si, poorly known. Low-dimensional nanostructures, such as carbon nanotubes, are predicted to have novel transport properties; the first quantitative experiments of the thermal conductivity of nanotubes have recently been achieved using microfabricated measurement systems. Nanoscale porosity decreases the permittivity of amorphous dielectrics but porosity also strongly decreases the thermal conductivity. The promise of improved thermoelectric materials and problems of thermal management of optoelectronic devices have stimulated extensive studies of semiconductor superlattices; agreement between experiment and theory is generally poor. Advances in measurement methods, e.g., the 3ω method, time-domain thermoreflectance, sources of coherent phonons, microfabricated test structures, and the scanning thermal microscope, are enabling new capabilities for nanoscale thermal metrology.

/pdf/nanoscale-thermal-transport-1frv881kzm.pdf

Nanoscale thermal transport

We review recent advances in experimental methods for high spatial-resolution and high time-resolution thermometry, and the application of these and related methods for measurements of thermal transport in low-dimensional structures. Scanning thermal microscopy (SThM) achieves lateral resolutions of 50 nm and a measurement bandwidth of 100 kHz: SThM has been used to characterize differences in energy dissipation in single-wall and multi-wall carbon nanotubes. Picosecond thermoreflectance enables ultrahigh time-resolution in thermal diffusion experiments and characterization of heat flow across interfaces between materials; the thermal conductance G of interfaces between dissimilar materials spans a relatively small range, 20<G<200 MW m -2 K -1 near room temperature. Scanning thermoreflectance microscopy provides nanosecond time resolution and submicron lateral resolution needed for studies of heat transfer in microelectronic, optoelectronic and micromechanical systems. A fully-micromachined solid immersion lens has been demonstrated and achieves thermal-radiation imaging with lateral resolution at far below the diffraction limit, <2 μm. Microfabricated metal bridges using electrical resistance thermometry and joule heating give precise data for thermal conductivity of single crystal films, multilayer thin films, epitaxial superlattices, polycrystalline films, and interlayer dielectrics. The room temperature thermal conductivity of single crystal films of Si is strongly reduced for layer thickness below 100 nm. The through-thickness thermal conductivity of Si-Ge and GaAs-AlAs superlattices has recently been shown to be smaller than the conductivity of the corresponding alloy. The 3ω method has been recently extended to measurements of anisotropic conduction in polyimide and superlattices. Data for carbon nanotubes measured using micromachined and suspended heaters and thermometers indicate a conductivity near room temperature greater than diamond.

https://nanoheat.stanford.edu/sites/default/files/publications/A57.pdf

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

To enhance the insulating properties of a thermal barrier coating, one has to focus on new materials with lower intrinsic thermal conductivity than established yttria-stabilized zirconia. Substances with pyrochlore structure were investigated. Starting from lanthanum zirconate, substitutions of the lanthanum by other trivalent rare-earth elements were made, and the thermal conductivity and the thermal expansion coefficient of the manufactured materials were measured. A complete substitution of the lanthanum led to increased thermal expansion coefficients, whereas the partial substitution did not show an appreciable effect. The thermal conductivities of the modified materials were lower than that of the pure lanthanum zirconate for temperatures <1000°C for all amounts and elements of substitution. A comparison of the observed values with calculated values of the thermal conductivities showed a relatively good agreement.

Thermal Conductivity and Thermal Expansion Coefficients of the Lanthanum Rare-Earth-Element Zirconate System

Thermoelectric power generation technology is now expected to help overcome global warming and climate change issues by recovering and converting waste heat into electricity, thus improving the total efficiency of energy utilization and suppressing the consumption of fossil fuels that are supposedly the major sources of CO2 emission. Thermoelectric oxides, composed of nontoxic, naturally abundant, light, and cheap elements, are expected to play a vital role in extensive applications for waste heat recovery in an air atmosphere. This review article summarizes our previous and ongoing studies on SrTiO3-based materials and further discusses nanostructuring approaches for both SrTiO3 and CaMnO3 materials. ZnMnGaO4 is taken as a model case for constructing a self-assembled nanostructure. The present status of thermoelectric oxide module development is also introduced and discussed.

Oxide Thermoelectric Materials: A Nanostructuring Approach

A review of recent advances in thermophysical properties at the nanoscale: From solid state to colloids

A grain-size-dependent reduction in the room-temperature thermal conductivity of nanocrystalline yttria-stabilized zirconia is reported for the first time. Films were grown by metal-organic chemical vapor deposition with controlled grain sizes from 10 to 100 nm. For grain sizes smaller than approximately 30 nm, a substantial reduction in thermal conductivity was observed, reaching a value of less than one-third the bulk value at the smallest grain sizes measured. The observed behavior is consistent with expectations based on an estimation of the phonon mean-free path in zirconia.

/pdf/grain-size-dependent-thermal-conductivity-of-nanocrystalline-1f3uju9ori.pdf

Grain-size-dependent thermal conductivity of nanocrystalline yttria-stabilized zirconia films grown by metal-organic chemical vapor deposition

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Grain-size-dependent thermal conductivity of nanocrystalline yttria-stabilized zirconia films grown by metal-organic chemical vapor deposition