G. Monaco
University of Padua
20 Papers
187 Citations
G. Monaco is an academic researcher from University of Padua. The author has contributed to research in topics: Thin film & Extreme ultraviolet. The author has an hindex of 9, co-authored 20 publications. Previous affiliations of G. Monaco include National Research Council.
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Papers
Realization and characterization of an XUV multilayer coating for attosecond pulses.
TL;DR: With this ML, the experimental characterization of an aperiodic reflecting multilayer structure designed to reflect and compress attosecond pulses in the extreme ultraviolet spectral region is presented and pulse compression by reflection is demonstrated.
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High performance EUV multilayer structures insensitive to capping layer optical parameters
TL;DR: An evolutive algorithm has been developed in order to design and test a-periodic multilayer structures containing protective capping layers, which have been proven to have also the property of stable performance with respect to random layer thickness errors that might occur during coating deposition.
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Reflectance measurements and optical constants in the extreme ultraviolet-vacuum ultraviolet regions for SiC with a different C/Si ratio
Denis Garoli,Fabio Frassetto,G. Monaco,P. Nicolosi,Maria G. Pelizzo,F. Rigato,V. Rigato,Angelo Giglia,Stefano Nannarone +8 more
TL;DR: Reflectance versus incidence angle measurements have been performed on samples of SiC with a different C/Si ratio deposited with rf magnetron sputtering to determine optical constants of the material at different wavelengths by using a curve-fitting technique.
29
Iridium/silicon multilayers for extreme ultraviolet applications in the 20–35 nm wavelength range
Paola Zuppella,G. Monaco,Alain Jody Corso,Piergiorgio Nicolosi,David L. Windt,Valentina Bello,Giovanni Mattei,Maria Guglielmina Pelizzo +7 more
TL;DR: Transmission electron microscopy and electron dispersive x-ray spectroscopy are used to examine the microstructure and interface properties of this Ir/Si multilayer for extreme ultraviolet (EUV) applications, finding amorphous Si layers and polycrystalline Ir layers, with asymmetric interlayer regions of mixed composition.
26
Optical constants in the EUV soft x-ray (5÷152 nm) spectral range of B4C thin films deposited by different deposition techniques
G. Monaco,Denis Garoli,R. Frison,V. Mattarello,Piergiorgio Nicolosi,Maria Guglielmina Pelizzo,Valentino Rigato,L. Armelao,Angelo Giglia,Stefano Nannarone +9 more
TL;DR: In this paper, B4C thin films were deposited on Si substrates by means of three different deposition techniques: RF plasma sputtering, e-beam evaporation, pulsed laser ablation (PLD).
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