Fernado Vereda
1 Papers
34 Citations
Fernado Vereda is an academic researcher. The author has contributed to research in topics: Thin film & Ion beam-assisted deposition. The author has an hindex of 1, co-authored 1 publications.
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Papers
Rapidly Grown IBAD LiPON Films with High Li-Ion Conductivity and Electrochemical Stability
TL;DR: In this article, nitrogen ion beam assisted deposition (IBAD) of thermally evaporated Li 3 PO 4 was used to rapidly deposit X-ray amorphous LiPON films with densities close to that of the handbook value for Li 3PO 4, high ionic conductivity (1.6 X 10 - 6 S/cm), and an electrochemical stability window of over 6.0 V. These properties, combined with the high deposition rates that can be achieved with this process (>1.0 nm/s), make it an attractive candidate for industrial production of
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