Abstract A novel probe based on a commercial quartz tuning fork and a microfabricated cantilever is presented. The U-shaped cantilever with a monolithic tip is combined with the tuning fork in a symmetrical arrangement, such that each of the two legs of the cantilever is fixed to one of the prongs of the tuning fork. The tuning fork is used as an oscillatory force sensor. Its frequency and amplitude governs that of the vibrating tip, while the cantilever determines the spring constant of the whole probe. Several probes with different cantilevers in terms of material and spring constant are studied. A typical silicon nitride cantilever has a spring constant of 0.1 N/m and those made of silicon have 1.2–319 N/m. Monoatomic terraces of highly oriented pyrolytic graphite (HOPG) was successfully imaged in the intermittent contact mode with the silicon probes. Both types of probes are suited for batch fabrication and assembling and, therefore enlarges the applications of the tuning fork based AFM.

Self-Sensing and -Actuating Probe Based on Quartz Tuning Fork Combined with Microfabrication Cantilever for Dynamic Mode Atomic Force Microscopy

A quartz tuning-fork (TF)-based scanning probe is presented for local electrical transport measurements on quantum devices below the liquid 4He temperature. The TF is utilized to drive and sense the mechanical oscillation of an attached, microfabricated cantilever featuring a conductive tip made of platinum silicide. The microfabricated structure allows the application of an external voltage to the tip, while the cantilever is electrically grounded. The probe was characterized at room temperature, 70 K, and 2 K. It was found that spatial sensitivity decreased with temperature. Imaging a gold surface at 2 K was successfully performed. A number of probes can be batch-fabricated, thus shortening the lead time for conducting experiments in cryogenic scanning force microscopy. © 2006 The Japan Society of Applied Physics.

Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature

Die vorliegende Arbeit behandelt die Neuentwicklung der Betriebselektronik fur eine Rasterkraftsonde die im Frequenzmodulationsverfahren betrieben wird. Rasterkraftsonden haben das Potenzial zukunftige Messaufgaben der Fertigungsmesstechnik, die durch Tastschnittgerate und Optische Messgerate nicht mehr gelost werden, zu losen. Als Grundlage fur die Entwicklung eines Sensors zum Messen rauer, technischer Oberflachen dient die Akiyama-Sonde: bei dieser handelt es sich um eine Rasterkraftsonde deren Auslenkung sensorlos, ohne zusatzliche Bauteile, detektiert werden kann. Im Rahmen dieser Arbeit wurde zunachst die Eignung der Akiyama-Sonde zum Messen technischer Oberflachen untersucht. Anschliesend wurde eine neue Betriebselektronik fur die Sonde entwickelt. Die neuentwickelte Elektronik zeichnet sich durch einen sehr einfachen Aufbau aus: in Kern besteht sie nur aus einem FPGA, einem Analog-Digital-Umsetzer und einem Digital-Analog-Umsetzer. Methodisch wurde bei der Entwicklung ein modellbasiertes Vorgehen gewahlt: Zunachst wurde die Akiyama-Sonde in ihrem Arbeitspunkt modelliert. Basierend auf dem Modell erfolgte der virtuelle Entwurf der Betriebselektronik. Ein physikalischer Prototyp wurde somit erst spat im Entwicklungsprozess benotigt. Abschliesend wurde anhand von Experimenten die Fahigkeit der neuen Betriebselektronik zum Messen von Auslenkungen im Nanometer-Bereich nachgewiesen.

Modellbasierte Entwicklung der Betriebselektronik für eine Rasterkraftsonde im Frequenzmodulationsverfahren zum Messen technischer Oberflächen

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Modellbasierte Entwicklung der Betriebselektronik für eine Rasterkraftsonde im Frequenzmodulationsverfahren zum Messen technischer Oberflächen