Fast, large-scale, and robust 3-dimensional (3D) fabrication techniques for patterning a variety of structures with submicrometer resolution are important in many areas of science and technology such as photonics, electronics, and mechanics with a wide range of applications from tissue engineering to nanoarchitected materials. From several promising 3D manufacturing techniques for realizing different classes of structures suitable for various applications, interference lithography with diffractive masks stands out for its potential to fabricate complex structures at fast speeds. However, the interference lithography masks demonstrated generally suffer from limitations in terms of the patterns that can be generated. To overcome some of these limitations, here we propose the metasurface-mask–assisted 3D nanofabrication which provides great freedom in patterning various periodic structures. To showcase the versatility of this platform, we design metasurface masks that generate exotic periodic lattices like gyroid, rotated cubic, and diamond structures. As a proof of concept, we experimentally demonstrate a diffractive element that can generate the diamond lattice.

https://www.pnas.org/content/pnas/116/43/21379.full.pdf

Metasurface-generated complex 3-dimensional optical fields for interference lithography

Metasurfaces comprise an array of pillars in a lattice. The dimensions of the pillars and the spacing are varied to obtain desired optical properties. The dispersionless metasurfaces can focus optical light over a broad wavelength range. Specific dispersion profiles for the metasurfaces can be designed. Gratings can be fabricated having similar properties as the array of pillars. Pillars in the metasurfaces can have different cross-section profiles.

Dispersionless and dispersion-controlled optical dielectric metasurfaces

Structures for scattering light at multiple wavelengths are disclosed. Scattering elements are fabricated with different geometric dimensions and arrangements, to scatter or focus light at the same focal distance for each wavelength, or at different focal distances according to the desired application. The scattering elements fabricated on a substrate can be peeled off with a polymer matrix and attached to a lens to modify the optical properties of the lens.

Conformal optical metasurfaces

A spectrometer includes a substrate; a slit which is provided on the substrate and through which light is incident onto the substrate; a metasurface including nanostructures that is configured to reflect and focus the light incident thereon through the slit, at different angles based on respective wavelengths; and a sensor which is provided on one side of the substrate that is opposite to another side of the substrate at which the metasurface is disposed, and configured to receive the light from the metasurface.

Spectrometer including metasurface

Embodiments are disclosed for an optical waveguide display configured for use with a near-eye display (NED) device. In an embodiment the waveguide display includes a light-transmissive substrate and an optical coupling element configured to input light rays to the substrate or output light rays from the substrate, the optical coupling element configured to deflect a plurality of wavelengths of an incident light ray collinearly for propagation within the light-transmissive substrate through total internal reflection (TIR). The optical coupling element can include a pattern of nano-structures that collectively form a metasurface on the substrate.

Metasurface optical coupling elements for a display waveguide

Provided is focusing device that includes a substrate and a plurality of scatterers provided at both sides of the substrate. The scatterers on the both sides of the focusing device may correct geometric aberration, and thus, a field of view (FOV) of the focusing device may be widened.

Focusing device, and beam scanner and scope device including the focusing device

Cascaded metasurfaces can control the phase, amplitude and polarization of an electromagnetic beam, shaping it in three dimensional configuration not achievable with other methods. Each cascaded metasurface has dielectric or metallic scatterers arranged in a period array. The shape of the scatterers determines the three dimensional configuration of the output beam and is determined with iterative calculations through computational simulations.

Metasurface-assisted 3d beam shaping

The present disclosure provides an image sensor including an imaging device and an imaging device having a structure suitable for a compact design. The disclosed imaging device includes first to third optical elements. At least one of the first to third optical elements is a thin lens including a nanostructure.

Imaging device and image sensor including the imaging device

Quantitative phase gradient microscopes (QPGM) using metasurface layers including birefringent lenses are disclosed. The birefringent lenses are manufactured by patterning nanoposts on two different transparent substrates or on opposite sides of the same transparent substrate. Methods to generate phase gradient images (PGI) of objects using the described devices are also disclosed.

Metasurface imager for quantitative phase gradient detection

Methods and devices to build and use multi-functional scattering structures. The disclosed methods and devices account for multiple target functions and can be implemented using fabrication methods based on two-photon polymerization or multi-layer lithography. Exemplary devices functioning as wave splitters are also described. Results confirming the performance and benefits of the disclosed teachings are also described.

Color and multi-spectral image sensor based on 3d engineered material

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