An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

Interferometric modulation of radiation

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.

Photonic mems and structures

The paper presents an overview and reports the recent progress of research on squeeze film air damping in MEMS. The review starts with the governing equations of squeeze film air damping: the nonlinear isothermal Reynolds equation and various reduced forms of the equation for different conditions. After the basic effects of squeeze film damping on the dynamic performances of micro-structures are discussed based on the analytical solutions to parallel plate problems, recent research on various aspects of squeeze film air damping are reviewed, including the squeeze film air damping of perforated and slotted plate, the squeeze film air damping in rarefied air and the squeeze film air damping of torsion mirrors. Finally, the simulation of squeeze film air damping is reviewed. For quick reference, important equations and curves are included.

Squeeze film air damping in MEMS

Droplet deposition apparatus comprising an array of fluid chambers defined by a pair of opposing chamber walls, and in fluid communication with a nozzle for droplet ejection therefrom; a cover member is joined to the edges of the chamber walls and thus seals one side of the chambers. The cover member has a ratio of cover thickness to chamber wall separation less than or equal to 1:1.

Droplet deposition apparatus

One aspect of the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements, each second element conforming to a second geometry; wherein fabricating the arrays comprises selecting a defining aspect of each of the first and second geometries based on a defining characteristic of each of the first and second elements; and normalizing differences in an actuation voltage required to actuate each of the first and second elements, wherein the differences are as a result of the selected defining aspect, the defining characteristic of each of the elements being unchanged.

A microelectromechanical systems device and method for fabricating same

A micro-electromechanical bistable shutter display device is provided capable of being implemented for both small screen, high resolution devices and for large billboard-type displays. The micro-electromechanical shutter assembly has bi-stability characteristics which allow the use of only a holding voltage to maintain an image. The micro-electromechanical shutter assembly includes a shutter having petal-like shutter segments covering reflective or transmittive films. To expose the film in a particular shutter assembly, its shutter segments are moved from the horizontal to a vertical position using electrostatic attraction forces to “collapse” the torsionally-hinged shutter segments. The shutter assembly can have a number of segments, as long as the resulting shutter assembly shape can be stacked to form a dense 2D array.

Micro-electromechanical based bistable color display sheets

A device for effecting motion of liquid droplets on a surface through the use of electrostatic field force includes a single substrate on which are disposed a plurality of spaced-apart electrodes. A dielectric material surrounds the electrodes on the substrate. The surface on which the liquid droplets are deposited is fabricated from a material that facilitates motion of the liquid droplets.

Apparatus and method for using electrostatic force to cause fluid movement

This paper presents analytical solutions for the effect of squeeze film damping on a MEMS torsion mirror. Both the Fourier series solution and the double sine series solution are derived for the linearized Reynold equation which is obtained under the assumption of small displacements. Analytical formulae for the squeeze film pressure variation and the squeeze film damping torque on the torsion mirror are derived. They are functions of the rotation angle and the angular velocity of the mirror. On the other hand, to verify the analytical modeling, the implicit finite difference method is applied to solve the nonlinear isothermal Reynold equation, and thus numerically determine the squeeze film damping torque on the mirror. The damping torques based on both the analytical modeling and the numerical modeling are then used in the equation of motion of the torsion mirror which is solved by the Runge-Kutta numerical method. We find that the dynamic angular response of the mirror based on the analytical damping model matches very well with that based on the numerical damping model. We also perform experimental measurements and obtain results which are consistent with those obtained from the analytical and numerical damping models. Although the analytical damping model is derived under the assumption of harmonic response of the torsion mirror, it is shown that with the air spring effect neglected, this damping model is still valid for the case of nonharmonic response. The dependence of the damping torque on the ambient pressure is also considered and found to be insignificant in a certain regime of the ambient pressure. Finally, the convergence of the series solutions is discussed, and an approximate one term formula is presented for the squeeze film damping torque on the torsion mirror.

http://iopscience.iop.org/article/10.1088/0960-1317/8/3/005/pdf

Squeeze film damping effect on the dynamic response of a MEMS torsion mirror

A magnetically actuated ink jet printing device for use in an ink jet printer ejects ink droplets by deforming a diaphragm with the force generated on an electrode in a magnetic field when an electric current pulse is applied thereto. In one embodiment, the diaphragm of the device is provided by anisotropically etching a silicon substrate with an etch stop which provides a thin membrane of silicon material for use as the diaphragm. An electrode having an input and output terminal is patterned over the diaphragm and a sacrificial layer is deposited over the silicon substrate surface containing the diaphragm. The sacrificial layer is patterned to subsequently provide the ink ejection chamber over the diaphragm. A patternable layer is deposited over the silicon substrate surface including the sacrificial layer and patterned to provide the nozzles and expose the electrode terminals. The sacrificial layer is removed and an ink supply is connected to the space previously occupied by the sacrificial layer. Magnetic field generating means having a predetermined magnetic field strength are placed adjacent the device, and electric current applied to the electrode terminals in a predetermined direction relative to the magnetic field produces a force necessary to deform the diaphragm and eject an ink droplet from the nozzles of the printing device.

A magnetically actuated ink jet printing device

A microelectromechanically tunable Fabry-Perot spectrophotometer is provided for color sensing Optical fiber provides light input to a Fabry-Perot filter which is adjusted by a switched capacitor circuit Spectral intensity is sensed by an integrated photodetector

Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer

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