E. Sirtl
2 Papers
96 Citations
E. Sirtl is an academic researcher. The author has contributed to research in topics: Deposition (phase transition) & Atmospheric temperature range. The author has an hindex of 2, co-authored 2 publications.
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Papers
High Temperature Reactions in the Silicon‐Hydrogen‐Chlorine System
E. Sirtl,L. P. Hunt,D. H. Sawyer +2 more
TL;DR: In this paper, the partial pressures of the gaseous species in equilibrium with solid silicon in the Si•H•Cl system are presented as a function of temperature for different Cl/H ratios and total pressures.
96
High temperature reactions in the silicon-hydrogen-chlorine system
E. Sirtl,L. P. Hunt,D. H. Sawyer +2 more
TL;DR: In this paper, the partial pressures of the gaseous species in equilibrium with solid silicon in the Si•H•Cl system are presented as a function of temperature for different Cl/H ratios and total pressures.
4