A new technique is introduced to replace DOEs that are used for illumination in lithographic
projectors with polarization computer generated holograms (PCGHs) that produce both arbitrary
intensity and arbitrary polarization state in the illumination pupil. The additional capability of
arbitrary polarization state adds an additional degree of freedom for source-mask optimization.
The PCGHs are similar in design and construction to DOEs, but they incorporate polarizationsensitive
elements. Three experiments are described that demonstrate different configurations of
PCGHs deigned to produce a tangentially polarized ring. Measurements of ratio of polarization
and polarization orientation indicate that all three configurations performed well. Experimetns
are performed with visible (λ = 632.8nm) light.

Polarization holograms for source-mask optimization

An etched calcite square-wave retarder is designed, fabricated, and demonstrated as an illuminator for an interlaced polarization computer-generated hologram (PCGH). The calcite square-wave retarder enables alternating columns of orthogonal linear polarizations to illuminate the interlaced PCGH. Together, these components produce a speckled, tangentially polarized PCGH diffraction pattern with a measured ratio of polarization of 84% and a degree of linear polarization of 0.81. An experimental alignment tolerance analysis is also reported.

Square-wave retarder for polarization computer-generated holography

A hologram is a tool for shaping the amplitude and the phase of a light wave. Shaping the amplitude distribution is easy, one way is by a photographic plate, another way is by binary pixels as used in "half-tone printing”. The phase distribution can be shaped by RE-fraction on a thin film of variable thickness, or by DIF-fraction on a diffraction grating that has been distorted on purpose.

Holography: Computer Generated Holograms

An interlaced polarization computer-generated hologram (PCGH) is designed to produce specific irradiance and polarization states in the image plane. The PCGH produces a tangentially polarized annular pattern with correlated speckle, which is achieved by a novel application of the diffuser optimization method. Alternating columns of orthogonal linear polarizations illuminate an interlaced PCGH, producing a ratio of polarization of 88% measured on a fabricated sample. The demonstrated technique can be applied to designs for arbitrary irradiance and polarization states in the image plane.

Polarization synthesis by computer-generated holography using orthogonally polarized and correlated speckle patterns

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Polarization synthesis by computer-generated holography using orthogonally polarized and correlated speckle patterns