E. B. Arkilic
Massachusetts Institute of Technology
5 Papers
24 Citations
E. B. Arkilic is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Flow measurement & Fabry–Pérot interferometer. The author has an hindex of 4, co-authored 5 publications.
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Papers
Mass flow and tangential momentum accommodation in silicon micromachined channels
TL;DR: In this paper, the tangential momentum accommodation coefficient (TMAC) for several gases in contact with single-crystal silicon was found to be less than unity, ranging from 0.75 to 0.85.
324
Fabry-Perot pressure sensor arrays for imaging surface pressure distributions
TL;DR: In this paper, a micromachined sensor array for mailing optical measurements of surface pressure distributions has been designed, fabricated and tested, and each sensor element in the array consists of a Fabry-Perot etalon fabricated from single-crystal silicon.
12
Sub-nanomol per second flow measurement near atmospheric pressure
TL;DR: In this paper, the authors present a measurement technique designed to accurately measure small flow rates near atmospheric pressure, and demonstrate the ability to measure flows on the order of 10-10 mol/sec.
10
A micromachined sensor array for optical measurements of surface pressure
M. F. Miller,M. G. Allen,E. B. Arkilic,Kenneth S. Breuer,Martin A. Schmidt +4 more
- 06 Jan 1997
TL;DR: In this article, a micromachined array of sensors for making spatially and temporally-resolved optical measurements of surface pressure has been designed, fabricated, and tested, each sensor element in the array consists of a Fabry-Perot etalon fabricated from single-crystal silicon.
4
Gaseous slip flow in long microchannels
TL;DR: In this paper, an analytic and experimental investigation into gaseous flow with slight rarefaction through long microchannels is undertaken, and the effect of slip upon the pressure distribution is derived, and it is obtained that this slip velocity leads directly to a wall normal migration of mass.