D. Restaino
IBM
1 Papers
119 Citations
D. Restaino is an academic researcher from IBM. The author has contributed to research in topics: Immersion lithography. The author has an hindex of 1, co-authored 1 publications.
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Papers
High Performance 45-nm SOI Technology with Enhanced Strain, Porous Low-k BEOL, and Immersion Lithography
Shreesh Narasimha,Katsunori Onishi,Hasan M. Nayfeh,A. Waite,M. Weybright,Jeffrey B. Johnson,Carlos A. Fonseca,D. Corliss,C. Robinson,Michael Crouse,D. Yang,C-H.J. Wu,Allen H. Gabor,Thomas N. Adam,Ishtiaq Ahsan,Michael P. Belyansky,L. Black,Shahid Butt,J. Cheng,Anthony I. Chou,G. Costrini,Christos D. Dimitrakopoulos,Anthony G. Domenicucci,P. Fisher,A. Frye,S. Gates,Stephen E. Greco,Stephan Grunow,M. Hargrove,Judson R. Holt,S.-J. Jeng,M. Kelling,B. Kim,William F. Landers,G. Larosa,D. Lea,Ming-Hsiu Lee,X. Liu,Naftali E. Lustig,A. McKnight,L. Nicholson,D. Nielsen,Karen A. Nummy,Viorel Ontalus,C. Ouyang,X. Ouyang,C. Prindle,R. Pal,Werner A. Rausch,D. Restaino,Christopher D. Sheraw,J. Sim,Andrew H. Simon,Theodorus E. Standaert,Chun-Yung Sung,Keith H. Tabakman,C. Tian,R. Van Den Nieuwenhuizen,H. van Meer,A. Vayshenker,Deepal Wehella-Gamage,J. Werking,R. C. Wong,S. Wu J. Yu,R. Augur,D. Brown,X. Chen,Daniel C. Edelstein,A. Grill,Mukesh Khare,Yujun Li,S. Luning,J. Norum,Sujatha Sankaran,Dominic J. Schepis,Richard A. Wachnik,Richard Wise,C. Wann,T. Ivers,Paul D. Agnello +79 more
- 01 Dec 2006
TL;DR: In this paper, the authors present a 45-nm SOI CMOS technology that features: i) aggressive ground-rule scaling enabled by 1.2NA/193nm immersion lithography, ii) high-performance FET response enabled by the integration of multiple advanced strain and activation techniques, iii) a functional SRAM with cell size of 0.37mum2, and iv) a porous low-k (k=2.4) dielectric for minimized back-end wiring delay.
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