High-frequency, thickness mode resonators were fabricated using a 7 /spl mu/m piezoelectric transducer (PZT) thick film that was produced using a modified composite ceramic sol-gel process. Initial studies dealt with the integration of the PZT thick film onto the substrate. Zirconium oxide (ZrO/sub 2/) was selected as a diffusion barrier layer and gave good results when used in conjunction with silicon oxide (SiO/sub 2/) as an etch stop layer. Using these conditions, devices were produced and the acoustic properties measured and modeled. The resonators showed a resonant frequency of about 200 MHz, an effective electromechanical coupling coefficient of 0.34, and a Q factor of 22. Modeling was based on a Mason-type model that gave good agreement between the experimental data and the simulations. The latter showed, for the PZT thick film, an electromechanical coupling coefficient of 0.35, a stiffness of 8.65/sup */10/sup 10/ N.m/sup -2/ and an e/sub 33/,/sub f/ Piezoelectric coefficient of 9 cm/sup -2/.

Fabrication and modeling of high-frequency PZT composite thick film membrance resonators

This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d 31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 μm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.

/pdf/characterisation-of-pzt-thin-film-micro-actuators-using-a-23oud25aii.pdf

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor.

High frequency, thickness mode resonators were fabricated using a 7 μm PZT thick film which was produced using a modified composite ceramic sol-gel process. Devices were produced and the acoustic properties measured for different electrode sizes ranging from 45*45 to 250*250 μm2. The best electrode size, which maximised the acoustic response and minimised the insertion loss, was found using an area of 110*110 μm2. This showed a resonant frequency of about 200 MHz, an electro-mechanical coupling coefficient effective of 0.29 and a Q factor of 22. The devices were modelled using a Mason type model which gave good agreement between the experimental data and the simulations. The latter showed for the PZT thick film an electro mechanical coupling coefficient of 0.4 and a stiffness of 8.55*1010 N·m−2.

High Frequency PZT Composite Thick Film Resonators

A MEMS ultrasonic transducer, based on thin film PZT membrane has been designed and successfully fabricated. This paper presents the design, fabrication, analysis, and testing results of the membrane devices. The transducers are square membranes, where silicon nitride is the supporting layer, with a piezoelectric capacitor structure of lead zirconium titanate (PZT), deposited on top. The PZT structure enables the actuation and sensing of ultrasonic waves. The thin film PZT was spin-coated on the device using a metal-organic deposition method, resulting in PZT thickness of 0.4 /spl mu/m. The average remanent polarization (+Pr) of the PZT was measured at 23.5 /spl mu/C/cm/sup 2/ with an average dielectric constant (K) of 1552. The membranes were individually released by a deep reactive ion etching (DRIE) of the back of the Si substrate, resulting in a structure with minimal crosstalk between the different elements when fabricated in arrays. Modal analysis was performed for the transducers on ANSYS. Simulation and experimental results match perfectly. The acoustic impedance, phase and impulse response for the transducers were calculated using KLM and Reeder-Winslow design, models. The transducers, fabricated in four different sizes ranging from 100 /spl mu/m/spl times/100 /spl mu/m to 1500 /spl mu/m/spl times/1500 /spl mu/m, were tested for impedance characteristics and electrical resonance modes were found at 15.6 MHz for the smallest membrane and 8.7 MHz for the largest one. Finally, the transducers were pulsed in a perfluorocarbon high dielectric strength solution, and echoes were received from an air-solution interface. This work shows the potential of thin film PZT for ultrasonic imaging transducers. The novel microfabrication process minimizes the transducer size and the spacing between individual devices while minimizing crosstalk. The use of the PZT allows for maximum sensitivity. A two dimensional array, like the one demonstrated in this work can be used for coronary artery imaging.

Micromachined piezoelectric ultrasonic imaging transducer

Traceable low force metrology should be an essential tool for nanotechnology Traceable
measurement of micro- and nanonewton forces would allow independent measurement
and comparison on material properties, MEMS behaviour and nanodimensional measurement
uncertainties Yet the current traceability infrastructure in the UK is incomplete
This thesis describes the incremental development of the low force facility at the National
Physical Laboratory (NPL)
The novel contribution of this thesis has three components First, specific modifications
to the NPL Low Force Balance were undertaken This involved developing novel or
highly modified solutions to address key issues, as well as undertaking detailed comparions
with external ans internal traceability references Second, a triskelion force sensor flexure
was proposed and mathematically modelled using both analytical and finite element techniques,
and compared to experimentally measured spring constant estimates The models
compared satisfactorily, though fabrication defects in developed prototype artefacts limited
the experimental confirmation of the models Third, a piezoelectric sensor approach for quasistatic
force measurement was proposed, experimentally evaluated and rejected Finally, an
improved design for a low force transfer artefact system is presented, harnessing the findings
of the reported investigations The proposed design combines proven strain-sensing technology
with the advantageous triskelion flexure, incorporating an external stage and packaging
aspects to achieve the requirements for a traceable low force transfer artefact

Development and characterisation of traceable force measurement for nanotechnology

This paper presents the fabrication, and testing results of a MEMS ultrasonic transducer, based on thin film PZT membrane. The PZT structure enables the actuation and the sensing of the ultrasonic waves. The transducer was tested for impedance characteristics, fundamental resonance modes. This work shows the potential of thin film PZT for ultrasonic imaging transducers. The novel microfabrication process minimizes the size of the transducers, the spacing between the individual devices while minimizing the cross talk. The use of the PZT allows for maximum sensitivity. A two-dimensional array, like the one demonstrated in this work can be potentially used for coronary artery imaging.

Fabrication of thin film piezoelectric ultrasonic transducer

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Micromachined piezoelectric ultrasonic imaging transducer

Fabrication of thin film piezoelectric ultrasonic transducer