Superconducting Bi2Sr2-xLaxCuO6+delta thin films were successfully deposited on (100) LaAlO3 and (100) SrTiO3 substrates by in situ RF-magnetron sputtering. The highest zero resistance temperature T-c0, reached 29 K. The film morphology is shown to be related with the sputtering gas pressure. The microstructures. of the films show ab-twinning. Atomic force microscopy image showed the films grow as terrace islands with no screw dislocation. For obtaining high quality La-2201 superconducting thin films, the sputtering gas pressure should be higher, and the compositions of the targets have to be modified by trial and error. (C) 1998 Elsevier Science B.V.

Epitaxial growth of Bi2Sr2−xLaxCuO6+δ thin films by RF-magnetron sputtering

Superconducting Bi2Sr2−xLaxCu1O6+δ thin films were successfully deposited on (100) and 6° mis-oriented substrates by RF-magnetron sputtering. To grow the Bi-2201 films on (100) substrate, the films show terraced islands with a-b twinning texture. Atomic force microscopy (AFM) revealed the steps had a height about half-unit-cell of 2201. The layer ledges of the terraces show closed loops and separated layer by layer. For the films growing on 6° tilted substrates,the films grow as striated islands without a-b twinning. It is proved that texture of the films has in-plane well-alignment for growing on vicinal substrates.

Morphology of Bi2Sr2−xLaxCu1O6+δ thin films grown on untilted and tilted substrates

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Morphology of Bi2Sr2−xLaxCu1O6+δ thin films grown on untilted and tilted substrates