MEMS sensors, actuators, and sub-systems can enable an important reduction in the size and mass of spacecrafts, first by replacing larger and heavier components, then by replacing entire subsystems, and finally by enabling the microfabrication of highly integrated picosats. Very small satellites (1 to 100 kg) stand to benefit the most from MEMS technologies. These small satellites are typically used for science or technology demonstration missions, with higher risk tolerance than multi-ton telecommunication satellites. While MEMS are playing a growing role on Earth in safety-critical applications, in the harsh and remote environment of space, reliability is still the crucial issue, and the absence of an accepted qualification methodology is holding back MEMS from wider use. An overview is given of the range of MEMS applications in space. An effective way to prove that MEMS can operate reliably in space is to use them in space: we illustrate how Cubesats (1 kg, 1 liter, cubic satellites in a standardized format to reduce launch costs) can serve as low-cost vectors for MEMS technology demonstration in space. The Cubesat SwissCube developed in Switzerland is used as one example of a rapid way to fly new microtechnologies, and also as an example of a spacecraft whose performance is only possible thanks to MEMS.

MEMS for pico- to micro-satellites

The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

Microelectromechanical systems (MEMS) technology is expected to play a significant role in avionics and in future space missions provided that the effect of radiation on the reliability of MEMS devices is well understood. Most tests, to date, have been performed on MEMS that operate based on electrostatic principles, and radiation-induced dielectric charging has been identified as a mechanism which can potentially limit the reliability of such devices. Experiments with piezoresistive and piezoelectrically actuated MEMS have also revealed changes in the operation of devices after exposure to different types of ionizing radiation. However, not many reports on the damage effects in MEMS due to fast neutrons exist. In this paper, we present results from mechanical and electrical tests on different materials which are typically used in microsystems, before and after exposure to fast neutrons. Changes were detected in the residual stress and in the resonant frequencies of silicon nitride microbeams. There was also evidence of radiation-induced charge trapping in metal-insulator-semiconductor capacitors fabricated from thermal oxide, silicon nitride, and aluminum oxide deposited by atomic layer deposition. Finally, we observed that the electrical properties of ferroelectric capacitors fabricated from lead zirconate titanate and lead strontium titanate thin films do not degrade after exposure to fast neutrons.

/pdf/effects-of-fast-neutrons-on-the-electromechanical-properties-1v2jov28sr.pdf

Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems

Space is an exciting but fundamentally unfriendly environment for humans. Space robotic systems (robots in orbit, planetary rovers, or even satellites) are of great importance to space exploration and perform tasks hazardous or impossible for humans. Using micro and nanotechnologies in space robotic systems results either in miniaturized systems in terms of volume and mass, while retaining or increasing their capabilities, or in space robots with increased capabilities while retaining their size due to the nature of their tasks. Examples of miniaturization possibilities for space robots and satellites are given, focusing on the challenges and the enabling technologies. The miniaturization process and the use of advanced micro and nanotechnologies in space will have a large beneficial impact in the years to come.

/pdf/miniaturization-and-micro-nanotechnology-in-space-robotics-30n4pxnlsr.pdf

Miniaturization and Micro/Nanotechnology in Space Robotics

Total-ionizing-dose (TID) effects on piezoelectric micromachined ultrasonic transducers (pMUTs) are investigated using 10-keV X-rays under different bias conditions. The corresponding changes in resonant frequency and quality factor are evaluated using impedance analysis methods. Radiation-generated electrons or holes are trapped in the pre-existing defects of piezoelectric materials. Therefore, the sensitivity of pMUTs to X-ray irradiation depends strongly on the device bias during irradiation. The trapped charges change stress and strain in the materials due to the inverse piezoelectric effect, resulting in resonant frequency shifts and quality factor variation.

Total-Ionizing-Dose Effects on Piezoelectric Micromachined Ultrasonic Transducers

Total ionizing dose (TID) measurements at low temperature (60 K) of a micro-electro-mechanical system (MEMS) microshutter array (MSA) indicate that exposing the MSA to ionizing radiation causes some of the shutters to stop operating properly. The number of non-functional shutters depends on the applied bias. With increasing dose, the number of micro-shutters that become non-functional increases.

Response of a MEMS Microshutter Operating at 60 K to Ionizing Radiation

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Response of a MEMS Microshutter Operating at 60 K to Ionizing Radiation