A gas mixture supplying method includes supplying plural kinds of gases through gas supply lines connected to a common pipeline and supplying a gas mixture of the plural kinds of gases from a gas outlet of the common pipeline to a region where the gas mixture is used through a gas mixture supply line. When two or more gases having different flow rates are supplied simultaneously, a gas having a relatively low flow rate is supplied from one of the gas supply lines provided at a position closer to the gas outlet than that for a gas having a relatively high flow rate.

Gas mixture supplying method and apparatus

An improved supply system for an ion source of an ion implantation tool and a method of operating the same is provided. By using a buffer volume between an SDS gas bottle and the ion source, stability of the gas flow to the ion source is significantly enhanced, while at the same time nearly all of the gas contents in the gas bottle may be available during operation of the ion implantation tool.

System and method for supplying precursor gases to an implantation tool

According to one embodiment, a cylinder cabinet includes a controller performing control in such a way that when the amount of a residual gas in a first gas container becomes a predetermined amount or smaller, a gas supply pipe that supplies gas is switched from a first gas supply pipe to a second gas supply pipe. Moreover, the controller performs control in such a way that the residual gas in the first gas container is recovered into the recovery container during a period in which the gas is supplied from a second gas container. Furthermore, the controller performs control in such a way that when the first gas container is replaced with a new gas container, the inside of the first gas supply pipe is purged with the residual gas stored in the recovery container.

Cylinder cabinet and semiconductor manufacturing system

An apparatus for producing disilane through pyrolysis of monosilane, includes: a monosilane pyrolysis unit; a solid particle removal unit which removes solid particles generated in the pyrolysis unit; a condensing unit which liquefies and collects unreacted monosilane, and disilane and higher silanes with three (3) to seven (7) silicon atoms as pyrolysis products excluding hydrogen from a gas with the solid particles removed; a first separation unit which separates monosilane from a mixture of the liquefied unreacted monosilane, disilane and higher silanes; and a second separation unit which separates disilane and higher silanes from the mixture with the monosilane removed. In accordance with the present disclosure, disilane can be produced economically and efficiently with high purity through pyrolysis of monosilane.

Method and apparatus for producing disilane through pyrolysis of monosilane

The invention relates to a facility (1) for supplying gas provided with an insulating chamber including a rear wall (102) and two side walls (100) as well as a door (101) that pivots about a vertical axis (X) in order to allow the opening and the closing of the chamber, said facility (1) including two multifunctional blocks (3) that protect a fluid circuit, are attached to said rear wall inside said chamber and each include: a single high-pressure regulator (4); a purging system made up of three low-pressure valves (V1, V2, V3); a means (6) for fluid connection to the contents of a cylinder (B, B'); and an outlet allowing a device to be supplied with gas, characterised in that the high-pressure regulator (4) is located upstream of the purging system, and in that the surface area of the wall recess of each multifunctional block on said rear wall is less than 270 cm 2 , preferably less than 220 cm 2 .

Facility for distributing working gas

A gas mixing and delivery system includes a first gas supply vessel including a first gas stored at a first pressure, a second gas supply vessel including a second gas stored at a second pressure, and a mixing vessel connected to each of the first and second gas supply vessels. The system further includes a buffer tank connected to the mixing vessel to receive a gas mixture including the first and second gases delivered from the mixing vessel. The buffer tank is configured to connect with a process tool. The system is further configured to produce a gas mixture including the first and second gases by facilitating delivery of the first and second gases into the mixing vessel, mixing the first and second gases in the mixing vessel and delivering the gas mixture from the mixing vessel to the buffer tank via a forcing gas that is at a pressure greater than the first pressure.

Fluid mixing and delivery system

The invention relates to a device for the supply of special gas, that can be mounted on a gas cylinder and comprises: a multi-function unit housing a fluid circuit comprising a single high-pressure regulator; a purge system consisting of three low-pressure valves; a means for fluidic connection towards the inner space of a cylinder; and an outlet enabling equipment to be supplied with gas. The invention is characterised in that the high-pressure regulator is arranged upstream of the purge system.

Miniature gas cabinet

Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.

Method for producing a high purity trisilane product from the pyrolysis of disilane

Dispositif de distribution de gaz speciaux apte a etre monte sur une bouteille de gaz comprenant un bloc multifonctions abritant un circuit de fluide comprenant : un unique detendeur haute pression, un systeme de purge constitue de trois vannes basse pression, un moyen de connexion fluidique vers le contenu d'une bouteille, une sortie permettant l'alimentation en gaz d'un equipement, caracterise en ce que le detendeur haute pression est situe en amont du systeme de purge.

Armoire a gaz miniature

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Fluid mixing and delivery system

Miniature gas cabinet

Method for producing a high purity trisilane product from the pyrolysis of disilane

Armoire a gaz miniature