Conrad Chevalier
University of British Columbia
1 Papers
74 Citations
Conrad Chevalier is an academic researcher from University of British Columbia. The author has contributed to research in topics: Wafer & Electrode. The author has an hindex of 1, co-authored 1 publications.
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Papers
A capacitively coupled microplasma (CCµP) formed in a channel in a quartz wafer
TL;DR: An optical emission plasma source with dimensions as small as 0.25×−0.5mm has been implemented on a quartz wafer as discussed by the authors, formed using a parallel plate, capacitively coupled geometry, operates at atmospheric pressure, uses a 13.56MHz power source at 5−25 W, with gas flows between 17−150mL−min−1, and is self-igniting.
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