Chun-Hung Lin
Industrial Technology Research Institute
2 Papers
3 Citations
Chun-Hung Lin is an academic researcher from Industrial Technology Research Institute. The author has contributed to research in topics: Substrate (printing). The author has an hindex of 1, co-authored 2 publications.
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Papers
Patent
Film removal method and apparatus
Chang Chia Chiang,Chin-Jyi Wu,Chen-Der Tsai,Chun-Hung Lin +3 more
- 01 Apr 2008
TL;DR: In this paper, a film removal method and apparatus for removing a film from a substrate is described, which comprises the steps of disposing a plasma generator and a sucking apparatus over the substrate, projecting a plasma beam from the plasma generator onto the film obliquely, disposing the sucking apparatus on a reflection path of plasma projected by the generator, and sucking a byproduct of an incomplete plasma reaction occurring to the film so as to keep a surface of the substrate clean, with a view to overcoming the drawbacks of deposition of the by-product which results from using the plasma as
3
Patent
Film removing method and film remover
Chang Chia Chiang,Chin-Jyi Wu,Chen-Der Tsai,Chun-Hung Lin +3 more
- 29 Nov 2007
TL;DR: In this paper, the authors proposed a method for removing a film from a substrate, and to provide a film remover, which includes steps of disposing a plasma generator and a sucking apparatus over the substrate, ejecting the plasma beam from the plasma generator onto the film obliquely, and disposing the sucking apparatus on a reflection path corresponding to plasma projected by the generator, thereby keeping a surface of the substrate clean.