High aspect ratio microstructures (HARMS) are of great importance for many application fields. Many defects are generated during the fabrication processes, especially in line microstructures, and it is necessary to examine the quality of the structures after each process. However, there is no suitable efficient nondestructive detection method to monitor microstructures during the fabrication processes. In this paper, an optical detection method capable of detecting the structures by analyzing the reflection of light on the line HARMS is proposed. According to the image of reflected visible light, this method can determine whether there are defects in structures, so as to realize efficient detection. Preliminary simulations and experiments have been performed to confirm the feasibility and validity of the proposed method for detecting line microstructures. This method is expected to obtain more information about microstructures by further optimizing system parameters.

https://www.mdpi.com/2072-666X/11/3/296/pdf

Optical Detection Method for High Aspect Ratio Microstructures.

In the editorial published in March 2016, I mentioned that one of the aims of Micromachines is to cover topics and technologies beyond silicon-based microsystems and microdevices [1].[...]

https://www.mdpi.com/2072-666X/7/10/178/pdf

Multiscale and Multimaterial Fabrication: The Challenge Ahead.

In the microfabrication processes, it is necessary to examine the quality of the structures to ensure the whole process runs smoothly. However, the examination process of pattern defects is interrupted during the fabrication of high-aspect-ratio microstructures. The inevitable pattern defects arise from capillary forces which occur during the liquid drying process. In this paper, a new method that enables us to fix the microstructures with gel to restrict deformations before the rinsed liquid drying process has been proposed. It is effective to avoid the capillary forces by preventing the formation of the liquid level. The process parameters, types of gel, gel time and observation time were discussed and the flatness and thickness of the gel layer could be controlled. A series of high-aspect-ratio microstructures were fixed in good condition by gel.

https://www.mdpi.com/2072-666X/7/7/115/pdf

A New Method of Fixing High-Aspect-Ratio Microstructures by Gel

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A New Method of Fixing High-Aspect-Ratio Microstructures by Gel