Chen-En Li
National Chung Hsing University
3 Papers
Chen-En Li is an academic researcher from National Chung Hsing University. The author has contributed to research in topics: Diffusion barrier & Barrier layer. The author has an hindex of 3, co-authored 3 publications.
Chat about Author
Papers
4-nm thick multilayer structure of multi-component (AlCrRuTaTiZr)Nx as robust diffusion barrier for Cu interconnects
TL;DR: In this paper, the authors developed a multilayer structure of alternating (AlCrRuTaTiZr)N 0.5 senary nitride and AlCrRuTiZR senary alloy with a total thickness of only 4nm as a diffusion barrier layer for application to Cu interconnects.
75
Ru incorporation on marked enhancement of diffusion resistance of multi-component alloy barrier layers
TL;DR: In this paper, amorphous AlCrTaTiZr quinary alloy and 20.5% Ru-incorporated ALCrTaZrRu senary alloy films were developed as diffusion barrier layers to inhibit Cu diffusion in interconnect structures.
36