Microelectromechanical systems (MEMS)-based sample carriers became a breakthrough for in situ inspection techniques, especially in transmission electron microscopy where the sample carrier functions as a microsized laboratory and enables dynamic studies on samples, such as nanoparticles, nanowires, lamellas, and 2-D materials. Microheaters allow for in situ manipulation of samples by applying heat stimuli such that sample properties and interactions can be studied in real time at elevated temperatures. However, currently developed microheaters still suffer from undesired effects such as mechanical deflection and limitations in temperature range, accuracy, and homogeneity. This review discusses advancements in the technological development of microheaters. Methods and results found in the literature are categorized to provide an overview of optimization methods for thermoelectromechanical design aspects. The knowledge from various application fields, including a critical reflection on mesoscopic material properties, is combined into a series of design guidelines. These compose instructions for developing and optimizing microheater characteristics, such as mechanical and thermal stress, temperature accuracy and homogeneity, power consumption, response time, and sample drift. Although this review and guide are applicable to many application fields that require a microheater, an emphasis is laid on aspects most relevant to the microheater as a high-temperature sample carrier for in situ experiments. [2017–0149]

A Review on Development and Optimization of Microheaters for High-Temperature In Situ Studies

The 3-Omega measurement technique was applied to a microbridge heater for the purpose of low power gas sensing. The sensor performance was evaluated for mixtures of CO2, Ar, He and CH4 in N2 in an isothermal chamber where concentrations were precisely controlled by mass flow controllers. A custom 3-Omega conditioning circuit controls the AC heating current and detection of the 3-Omega voltage signal. The amplitude and phase lag, and the in-phase and out-of-phase components of the 3-Omega signal are presented for each case and are related directly to gas concentrations. Advantageously, the phase lag can determine the gas concentration without calibration of an individual gas sensor. Using this technique and our current microbridge thermal conductivity detector (TCD), it is possible to resolve gas concentrations down to 0.07%. The frequency behavior of the 3-Omega signal as it pertains to the thermal environment and sensor sensitivity is discussed. The 3-Omega technique combined with the microbridge is capable of operating with power consumptions that are

/pdf/a-microbridge-heater-for-low-power-gas-sensing-based-on-the-1sp83azd8a.pdf

A microbridge heater for low power gas sensing based on the 3-Omega technique

This work describes the fabrication and characterization of a Micro-Electro-Mechanical System (MEMS) sensor for gas sensing applications. The sensor is based on standard PolyMUMPs (Polysilicon Multi-Users MEMS Process) technology to control the temperature over the sensing layer. Due to its compact size and low power consumption, micro-structures enable a well-designed gas-sensing-layer interaction, resulting in higher sensitivity compared to the ordinary materials. The aim of conducting the characterization is to compare the measured and calculated resistance values of the micro-heater and the temperature sensor. The temperature coefficient of resistance (TCR) of the temperature sensor has been estimated by raising and dropping the temperature throughout a 25–110 °C range. The sensitivity of these sensors is dependent on the TCR value. The temperature sensor resistance was observed to rise alongside the rising environmental temperatures or increasing voltages given to the micro-heater, with a correlation value of 0.99. When compared to the TCR reported in the literature for the gold material 0.0034 °C−1, the average TCR was determined to be 0.00325 °C−1 and 0.0035 °C−1, respectively, indicating inaccuracies of 4.6% and 2.9%, respectively. The variation between observed and reported values is assumed to be caused by the fabrication tolerances of the design dimensions or material characteristics.

/pdf/fabrication-and-characterization-of-the-micro-heater-and-299vv9xo.pdf

Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor

A low-power microelectromechanical system-based metal-oxide gas sensor along with integrated signal conditioning unit is presented in this study to detect and quantify the variation of H
 2
 gas concentrations. The interface circuit controls the sensor operating temperature, measures the H
 2
 gas concentration, contributes a user-friendly interface and can be used with any suitable sensor network. A PIC16F877A microcontroller has been used for this purpose. The temperature of the sensors was stabilised by controlling the actuating voltage of the microheater. Temperatures of the microheater depend on the output voltage of the digital-to-analogue converter (DAC) and were measured by sampling the heater resistance through the use of a voltage divider and analogue-to-digital converters (ADCs). A microcontroller accordingly adjusts the output of DAC's in order to apply the appropriate steering voltage to the heaters. The method employed to measure the concentration of gases is to sample the voltage drop over the resistances of the sensors by ADCs. Alarming system for safety measure was also implemented in this design. The preventive action was taken by introducing an additional feature of wireless communication by sending short message service via global system for mobile modem to the designated emergency number.

https://ietresearch.onlinelibrary.wiley.com/doi/epdf/10.1049/iet-cds.2017.0243

Development of integrated microsystem for hydrogen gas detection

A Platinum Cantilever-Based Thermal Conductivity Detector for Ammonia Sensing Using the 3-Omega Technique

A microhotplate array comprising four 100 μm x 100 μm unit cells has been designed. It has a multi-layer structure: Si-thermal oxide-polySi-PECVD (plasma enhanced chemical vapour deposition) oxide-Sputtered Pt-Gas sensing film (SnO 2 ). Electro-thermal simulation of the unit cell has been carried out using ANSYS. The simulations show that for an applied bias of 4 V a mean temperature of 706°C is obtained at the centre of the heater area. The heat is assumed to flow from the hot plate to the surrounding air at an ambient temperature of 30°C by conduction. The power dissipation is less than 50 mW. The paper presents the design methodology of the hotplate.

/pdf/design-and-electro-thermal-simulation-of-a-polysilicon-4en15mxbeb.pdf

Design and electro-thermal simulation of a polysilicon microheater on a suspended membrane for use in gas sensing

Handle everyday research tasks with reliable, citation-backed results

Your personal Research Agent to handle research tasks with citation-backed results

Popular Tasks used by Researchers

How can I help with your research?

Meet SciSpace

Get more enhanced response by uploading the PDFs you want me to reference.

No relevant PDFs in your library

SciSpace is the AI research assistant for academics. Run systematic literature reviews on 280M+ papers, and write papers with cited sources. Trusted by 1M+ students, PhDs & researchers.

SciSpace | AI for Research

Analyze PDFs

Code & Manuscripts

Funding & Grants

Literature & Patents

Medical & Clinical Data

Systematic Review

Visualize & Present

Web & Data

Build a Google Scholar-like website for your research.

Build a website

Create charts and images for your research

Create a Chart

Write a paper for submission to a journal

Draft a manuscript

Patent Search

Design eye-catching scientific posters in minutes.

Scientific Poster Generation

Systematic Literature Review

One task is running at the moment. Your messages will be shown right after.

Drag and drop or click here to browse

Loved by <highlight>1 million+</highlight> researchers

Extract a list of specific topics and their sources from unstructured text

Topics

Compare and analyze relevant papers that matches with your search

Papers

Get insights from PDFs and bookmarked papers from your library

My library

Recent searches

Try searching for:

Catch AI-generated content in scholarly and non-scholarly content

{ai} Detector

Ai Writer

Get PDF Summaries, highlighted text explanations 

Chat with PDF

Effortlessly create in-text citations and bibliographies in APA and 2,500 other formats

Citation generator

Get explanations, summaries, and answers on academic papers

Ease up your research workflow with {scispace}'s cohort of exciting AI tools

Elevate your academic writing skills and convey your ideas the way you want

Paraphraser

Explore our range of reading and writing tools

Your file is being prepared and should be ready in a few minutes. If it's a large file, it might take a bit longer. You can close this window, and we'll email you the file when it's done.

You have reached a maximum limit of <strong>{limit}</strong> columns in the table. Remove at least <strong>1</strong> column to add or create another one.

Chandra Shekhar

Author Tools

Chat about Author

Papers

Design and electro-thermal simulation of a polysilicon microheater on a suspended membrane for use in gas sensing