C. LeRoyer
1 Papers
C. LeRoyer is an academic researcher. The author has contributed to research in topics: Wafer & Wafer bonding. The author has an hindex of 1, co-authored 1 publications.
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Papers
3D monolithic integration: Technological challenges and electrical results
Maud Vinet,Perrine Batude,Claude Tabone,Bernard Previtali,C. LeRoyer,A. Pouydebasque,Laurent Clavelier,A. Valentian,Olivier P. Thomas,S. Michaud,Loic Sanchez,L. Baud,A. Roman,V. Carron,Fabrice Nemouchi,V. Mazzocchi,H. Grampeix,Amara Amara,Simon Deleonibus,O. Faynot +19 more
TL;DR: In this paper, the main technological challenges associated with monolithic 3D integration are reviewed and solutions to assess them are proposed, and the electrical results obtained within this integration scheme are summarized: mixed Ge over Si invertor is demonstrated and electrostatic coupling between top and bottom layer is used to shift the threshold voltage of the top layer.
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