Blake Davis
IBM
28 Papers
313 Citations
Blake Davis is an academic researcher from IBM. The author has contributed to research in topics: Resist & Photolithography. The author has an hindex of 10, co-authored 28 publications. Previous affiliations of Blake Davis include GlobalFoundries.
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Papers
Liquid immersion lithography: evaluation of resist issues
William D. Hinsberg,Gregory M. Wallraff,Carl E. Larson,Blake Davis,Vaughn R. Deline,Simone Raoux,Dolores C. Miller,Frances A. Houle,John A. Hoffnagle,Martha I. Sanchez,Charles T. Rettner,Linda K. Sundberg,David R. Medeiros,Ralph R. Dammel,Willard E. Conley +14 more
- 14 May 2004
TL;DR: In this paper, the authors address a set of key questions tied to the implementation of liquid immersion lithography from the perspective of the resist materials and discuss the broad question of whether chemically amplified resists are capable of achieving the spatial resolution that ultimately will be required for the most advanced immersion scenario.
55
Patent
Spin-on antireflective coating for integration of patternable dielectric materials and interconnect structures
Robert D. Allen,Phillip J. Brock,Blake Davis,Wu-Song S. Huang,Qinghuang Lin,Alshakim Nelson,Sampath Purushothaman,Ratnam Sooriyakumaran +7 more
- 03 May 2010
TL;DR: In this article, a simplified method of fabricating single damascene and dual-damascene low-k interconnect structures with at least one patternable low k dielectric and at least inorganic antireflective coating is presented.
43
Patent
Photopatternable dielectric materials for BEOL applications and methods for use
Robert D. Allen,Phillip J. Brock,Blake Davis,Geraud Dubois,Qinghuang Lin,Robert D. Miller,Alshakim Nelson,Sampath Purushothaman,Ratnam Sooriyakumaran +8 more
- 23 May 2008
TL;DR: In this article, a method and a composition for forming a coating on a substrate is described, which includes at least one carbosilane-substituted silsesquioxane polymer which crosslinks in the presence of an acid.
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High-throughput directed self-assembly of core-shell ferrimagnetic nanoparticle arrays.
TL;DR: This work demonstrates the viability of magnetic nanoparticles for patterned recording media utilizing a template-directed self-assembly process to afford well-defined nanostructures of Magnetic nanoparticles and access these assemblies using magnetic force microscopy and a magnetic recording head.
28
Patent
Method of use for photopatternable dielectric materials for beol applications
Robert D. Allen,Phillip Joe Brock,Blake Davis,Qinghuang Lin,Robert D. Miller,Alshakim Nelson,Ratnam Sooriyakumaran +6 more
- 18 May 2007
TL;DR: In this article, the authors describe a method for dip coating a film of a composition on a silicon wafer substrate, which is patternwise imaged and at least one region is exposed to radiation having a wavelength of about 248 nm.
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