To ensure the machining quality of micro/nano scale structural units for meter scale workpieces, relay turning with multiple single-point diamond tools has been broadly required. However, the existing tool setting methods have the problems of long tool setting time and low tool setting accuracy. To address the above issues, a novel normalized variational auto-encoder model with an adaptive activation function (NVAE-AAF) is proposed in this article. The batch normalization and the adaptive activation function are introduced into the variational auto-encoder model to learn robust features of force signals at the tool idle move state. Then, the reconstruction error threshold is constructed according to the kernel density estimation method to realize the nanoscale tool setting. In the ultraprecision tool setting experiments based on piezoelectric ceramic force sensing, the reconstruction error of the force signals at the tool idle move state is less than 0.07%, and the contact detection accuracy reached 92%. Compared to the traditional trial cutting for tool setting method, the proposed method significantly improves tool setting accuracy by 75%–85%, reaching a level of 75 nm.

Normalized Variational Auto-Encoder With the Adaptive Activation Function for Tool Setting in Ultraprecision Turning

Unknown micro-contact forces may affect operation accuracy in micro-operation technology and high-precision contact measurement. Existing micro force sensors are unable to meet the demand for high resolution, large range, and low cost. Therefore, a more economical solution for high-precision force measurement is needed. A high-precision optical force sensor (OPFS) with a simple sensing principle is proposed in this study. The OPFS is mainly composed of a laser diode, a force-sensitive structure, and a four-quadrant photodetector (QPD). When force is applied to the measuring platform, the force-sensitive structure produces the corresponding elastic deformation, which is sensed by the QPD. The multi-range and customized resolution of the OPFS can be achieved by adjusting the stiffness of the force-sensitive structure. The design and optimization of the OPFS are completed via theoretical modeling and simulation analysis. The performance of the OPFS is examined experimentally. The OPFS is found to have a sensitivity of 0.27 mV/ <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{N}$ </tex-math></inline-formula> , a measuring range of 0–2.71 mN, and a resolution of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$32\mu \text{N}$ </tex-math></inline-formula> . The measurement uncertainty of the OPFS due to nonlinearity, resolution, repeatability, and drift is <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$82\mu \text{N}$ </tex-math></inline-formula> . The effectiveness of the OPFS in the measurement of micro-forces is verified. Finally, the OPFS is used to measure the contact force of a micro/nano contact probe. The results show that OPFS can be used for force calibration in micro/nano contact measurement instruments. 

Development of a High-Precision Optical Force Sensor With μN-Level Resolution

Micro-coordinate metrology is currently limited when the probing system works on the microscale, especially when measuring high aspect ratio microstructures with horizontal internal dimensions below <inline-formula> <tex-math notation="LaTeX">$100~\mu \text{m}$ </tex-math></inline-formula> due to the oversized probe ball tip and short stylus length. The accuracy and reliability of the measurement are also influenced by the surface interface effects. To solve these existing problems, we developed a nano precision probing system with a micro monolithic tungsten ball tip. Initially, the surface interaction effects during the tip-surface approaching tests are investigated. On this basis, the probe was designed to use surface interaction forces as the triggering force. The sensing principle of the optimized optic lever light paths is investigated and analyzed to acquire the isotropic sensitivity. The elastic mechanism with isotropic stiffness suitable for small triggering forces is designed through ANSYS software. The modeling of the probe and the mechanical design as well as the assembly of the micro stylus are reported. Experimental tests demonstrate that the probe can operate in a noncontact mode with 1-nm resolution, and the repeatability is better than 16 nm. The permissible measurement range is <inline-formula> <tex-math notation="LaTeX">$\pm 10~\mu \text{m}$ </tex-math></inline-formula> in the <inline-formula> <tex-math notation="LaTeX">$x$ </tex-math></inline-formula>- and <inline-formula> <tex-math notation="LaTeX">$y$ </tex-math></inline-formula>-axes and <inline-formula> <tex-math notation="LaTeX">$10~\mu \text{m}$ </tex-math></inline-formula> in the <inline-formula> <tex-math notation="LaTeX">$z$ </tex-math></inline-formula>-axis. The comprehensive uncertainty of the probing system is 16 nm. The probe is also verified by measuring a micro hole and a microgroove. The developed probing system is well-suited for high aspect ratio microstructure measurements with horizontal internal dimensions below <inline-formula> <tex-math notation="LaTeX">$100~\mu \text{m}$ </tex-math></inline-formula>.

Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm

Abstract This paper proposes, designs, manufactures and experimentally studies a wedge valve piezoelectric pump driven by a double displacement amplifier vibrator (DDAV). A novel wedge valve is designed, manufactured and analyzed, and the static performance of the wedge valve is tested. The test results show that it has less forward resistance and high reverse shutoff. The DDAV and pump body are designed, and the test experimental platform is built. Results indicate that the static opening pressure of the wedge valve is 0.27 kPa, and the reverse shutoff pressure can reach 200 kPa. When the driving voltage is 700 Vpp and the driving frequency is 425 Hz, the maximum flow rate is 491.2 ml min −1 and the maximum output pressure is 160 kPa. 

Design and research of a valve-based piezoelectric pump with low forward resistance and high reverse shutoff

The delivery and distribution of fluid have wide applications in biomedicine, the fine chemical industry, pharmaceutical research, and other fields. However, existing fluid delivery and distribution systems often suffer from issues such as large size, excessive noise generation, and high-power consumption, rendering them unsuitable for convenient applications. Here, a wheel-shaped valve piezoelectric micropump with a size of only 10 mm*10 mm*1 mm is proposed and a prototype is prepared. The vibration mode, operating principle, and the liquid flow of the micropump are analyzed by finite element method. The output liquid (distilled water) flowrate of the pump is approximately 15 ml/min, and the maximum pump distilled water pressure can reach 100 KPa. The results indicate that the performance of the micropump is consistent with the analysis results, which shows its potential application in the field of portable devices and medical. 

Design and analysis of a wheel valve piezoelectric micropump with high performance

The characterization of a high-precision component with its dimensions has become a key problem in ensuring the performance of system parts. A touch trigger probe plays an important role in experimentally measuring these properties. In this study, a new high-resolution touch trigger probe based on a modified optical lever method is proposed. Only one optical sensor is adopted. The sensing principle of the developed probe in 3D is investigated through the probe’s sensitivity models. An optimizing design of the elastic suspension is demonstrated. Experiments on probe performance are conducted by measuring a step height and a gauge block. Experimental results indicate that the probe achieves a resolution of up to 1 nm in 3D and a measurement standard deviation of 18.3 nm. The probe has a permissible range of ± <inline-formula> <tex-math notation="LaTeX">$20~\mu \text{m}$ </tex-math></inline-formula> in the <inline-formula> <tex-math notation="LaTeX">${x}/{y}$ </tex-math></inline-formula>-axis and <inline-formula> <tex-math notation="LaTeX">$20~\mu \text{m}$ </tex-math></inline-formula> in <inline-formula> <tex-math notation="LaTeX">${z}$ </tex-math></inline-formula>-axis. The drift of the probe is 5.2 nm within 30 min. The comprehensive uncertainty of the probing system is 18.45 nm. The developed probe can be used in micro/nano coordinate measuring machines.

Development of a High-Resolution Touch Trigger Probe Based on an Optical Lever for Measuring Micro Components

An increasing number of micro/nano-components with complex structures have emerged in recent years. Different kinds of feature sizes usually exist in a single component and require the use of instruments with nanometer-level accuracy. The traditional types of equipment cannot meet the current demands because of their lack of function and effectiveness. In this study, a multifunctional probe is designed by combining the interference and focusing principles. The Linnik principle is adopted in the interferometry module for its high vertical resolution and large horizontal range and its ability to measure surface topography. The focusing module modified from a Blue-ray DVD pickup head has a high horizontal resolution and a large vertical range suitable for measuring step height and line/groove width. The two modules share a polarizing beam splitter and an objective lens to reduce probe size. Then, the probe is manufactured, calibrated, and verified by measuring the surface topography with a reference height of 100 nm, a step height of approximately $4~\mu \text{m}$ , and a diameter of approximately $25~\mu \text{m}$ . The proposed probe has a high resolution and large range in 3D and can measure high-precision components with multiple features.

Development of a High-Precision Multifunctional Probe for Measuring Microstructures

Undeniably, adjustable power supply has many applications in ion chromatography. One example would be that a safe and stable adjustable power supply is indispensable for the driving part of the suppressor in ion chromatography. However, the traditional design of adjustable power supply suffers from high complexity, leading to its incompetence for practical engineering under the background of the continuous shortage of chips. Therefore, a method for an adjustable power supply module for ion chromatography is proposed and studied. Firstly, the microprocessor is used to output the MCPWM wave to control the output voltage of the flyback transformer. Secondly, the OCADC is used to collect the feedback voltage. Thirdly, the duty cycle of the MCPWM is adjusted using the PID algorithm to achieve constant voltage output. Further, hardware overcurrent protection is realized through MCPWM fast interrupt function. By this method, an adjustable power supply with a wide voltage output range, high current, and low voltage ripple can be output with less chip resources. Both the theoretical design scheme and the specific hardware circuit of this design is presented. Moreover, a simulation verification analysis is made. Finally comes the verification of the feasibility of this method.

Design and Implementation of Adjustable Voltage Source Module for Ion Chromatography

With the increasing number of lab burn-in samples, this paper proposes a parallel test approach for the problem that the single-device test board cannot meet the requirements of the JEDEC standard for the large number of samples with high efficiency. The designed FPGA control board independently separates 4 control SCAN signals, different SCAN chips perform read operations in sequence, and complete the operation in parallel. The experimental results show that, compared with the single-device test board, the MT test board can test 80 chips at the same time, which meets the requirements of the JEDEC standard, and reduces the requirement for hardware resources in the burn-in test, and improves test efficiency.

A Study on Parallel Test Approach for the Flash Burn-in Experiment in Laboratory

This study designs, fabricates and tests a piezoelectric pump with the structure of a polystyrene ball check valve. The structure of the check valve consists of three layers of specially designed p...

Development of a piezoelectric pump with ball valve structure

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