Comprehensive characterization techniques are applied to investigate the kinetics of native oxide formation on nanometer-scale films of NbTiN deposited using a physical vapor deposition process on silicon substrates coated with silicon nitride. 

Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films

We report on design, fabrication, and characterization of silicon quantum photonic integrated circuits comprising superconducting nanostripe single-photon detectors integrated with dielectric optical waveguides. In order to enhance absorption of photons by the superconducting nanostripes, the detectors are located directly on the dielectric waveguide core.

Silicon Quantum Photonic Integrated Circuits Comprising Superconducting Nanostripe Single-Photon Detectors

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Silicon Quantum Photonic Integrated Circuits Comprising Superconducting Nanostripe Single-Photon Detectors