Fast, large-scale, and robust 3-dimensional (3D) fabrication techniques for patterning a variety of structures with submicrometer resolution are important in many areas of science and technology such as photonics, electronics, and mechanics with a wide range of applications from tissue engineering to nanoarchitected materials. From several promising 3D manufacturing techniques for realizing different classes of structures suitable for various applications, interference lithography with diffractive masks stands out for its potential to fabricate complex structures at fast speeds. However, the interference lithography masks demonstrated generally suffer from limitations in terms of the patterns that can be generated. To overcome some of these limitations, here we propose the metasurface-mask–assisted 3D nanofabrication which provides great freedom in patterning various periodic structures. To showcase the versatility of this platform, we design metasurface masks that generate exotic periodic lattices like gyroid, rotated cubic, and diamond structures. As a proof of concept, we experimentally demonstrate a diffractive element that can generate the diamond lattice.

https://www.pnas.org/content/pnas/116/43/21379.full.pdf

Metasurface-generated complex 3-dimensional optical fields for interference lithography

A transceiver system may include first and second metasurfaces, such as radio frequency (RF) metasurfaces or optically reflective tunable liquid crystal metasurfaces (LCMs). In one specific example, a transmit LCM may be tuned by a controller to steerably reflect incident optical radiation at a target transmit steering angle. A laser or other optical radiation source may transmit optical radiation to the transmit LCM at a first angle of incidence. The controller may tune the second tunable LCM to steerably receive optical radiation at a target receive steering angle corresponding to the target transmit steering angle. The received optical radiation may be reflected at a second angle of incidence to a detector.

Sidelobe suppression in metasurface devices

The invention designs a laminated metasurface capable of realizing full-space holography, and relates to the field of micro-nano optics and holography. The metasurface is composed of a substrate layer, a first nanometer brick array layer, an isolation layer and a second nanometer brick array layer, and phase modulation of transmitted light and reflected light can be achieved at the same time. Whenlight enters the metasurface, part of the light is reflected, and a holographic image is formed in a reflection space; part of the light is transmitted, and a holographic image is formed in a transmission space. The two holographic images are independent of each other and do not influence each other. The laminated metasurface can be applied to the fields of high-end display, virtual reality, augmented reality and the like.

Laminated metasurface capable of realizing full-space holography

The invention provides an orthogonal polarized light imaging diffractive optical device based on a super-structure surface. The orthogonal polarized light imaging diffractive optical device is composed of a substrate and sub-wavelength optical antennas arranged on a surface of the substrate in an array mode, wherein the sub-wavelength optical antenna array is a two-dimensional array, directions parallel to the row and the column of the sub-wavelength optical antenna array are used as an x axis and a y axis respectively, the cross section shape of each optical antenna along the xy plane has C2symmetry, the length and the width of each optical antenna are respectively 1/20 to 1/2 of the working wavelength, the heights of the optical antennas are equal and are in a sub-wavelength range, anda center distance between two adjacent optical antennas is equal and does not exceed half of the working wavelength; the transmission phase is applied to the orthogonal linearly polarized light by designing the length and width of each optical antenna, and the transmission phase and the geometric phase are simultaneously applied to the orthogonal circularly polarized light by designing the lengthand width and the rotation angle of each optical antenna. The orthogonal polarized light imaging diffractive optical device is advantaged in that simultaneous focusing imaging of different positions of the orthogonal polarized light can be realized by using one unit structure.

Orthogonal polarized light imaging diffractive optical device based on meta-structure surface

A flexible spiral antenna or flexible antenna array element includes a flexible dielectric medium, a spiral element including a first arm and a second arm. The spiral element includes a liquid metal material and is disposed in the dielectric medium. The flexible antenna element also includes a first flexible meta surface layer disposed in the dielectric medium. The antenna can be or be part of an ultra-wide frequency band antenna or antenna array.

Flexible spiral antenna

Cascaded metasurfaces can control the phase, amplitude and polarization of an electromagnetic beam, shaping it in three dimensional configuration not achievable with other methods. Each cascaded metasurface has dielectric or metallic scatterers arranged in a period array. The shape of the scatterers determines the three dimensional configuration of the output beam and is determined with iterative calculations through computational simulations.

Metasurface-assisted 3d beam shaping

Quantitative phase gradient microscopes (QPGM) using metasurface layers including birefringent lenses are disclosed. The birefringent lenses are manufactured by patterning nanoposts on two different transparent substrates or on opposite sides of the same transparent substrate. Methods to generate phase gradient images (PGI) of objects using the described devices are also disclosed.

Metasurface imager for quantitative phase gradient detection

Hyperspectal imagers including reflective and transmissive metasurfaces are disclosed. The described metasurfaces are used collectively to disperse and focus light of different wavelengths and incident angles on a focal plane. The disclosed devices are compact and light, and can be used in systems and applications requiring stringent form factors.

Folded metasurface hyperspectral imager

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Metasurface-assisted 3d beam shaping

Metasurface imager for quantitative phase gradient detection

Folded metasurface hyperspectral imager