Ali Arshadi
Ruhr University Bochum
5 Papers
Ali Arshadi is an academic researcher from Ruhr University Bochum. The author has contributed to research in topics: Plasma diagnostics & Plasma parameters. The author has an hindex of 3, co-authored 5 publications.
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Papers
A simple and straightforward expression for curling probe electron density diagnosis in reactive plasmas
Abstract: Active plasma resonance spectroscopy (APRS) refers to the family of plasma diagnostic methods which utilize the ability of plasmas to resonate at frequencies close to the plasma frequency. APRS operates by exciting the plasma with a weak RF signal by means of a small electric probe. The response of the plasma is recorded by a network analyzer (NA). A mathematical model is applied to derive characteristics like the electron density and the electron temperature. The curling probe is a promising realization of APRS. The curling probe is well-qualified for the local measurement of the electron density in reactive plasmas. This spiral probe resonates in plasma at a larger density dependent frequency than the plasma frequency. This manuscript represents a simple and straightforward expression relating this resonance frequency to the electron density of the plasma. A good agreement is observed between the proposed expression and the results obtained from previous studies and numerical simulations.
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Analytical investigation of microwave resonances of a curling probe for low and high-pressure plasma diagnostics
Ali Arshadi,Ralf Peter Brinkmann +1 more
TL;DR: Arshadi and Brinkmann as mentioned in this paper generalize the approach and models the Curling Probe by a rectangular slot-type resonator located between plasma and quartz, which can be applied in varying plasma regimes.
10
Analytic description of the resonance frequencies of curling probe
Ali Arshadi,Ralf Peter Brinkmann +1 more
- 24 May 2015
TL;DR: The curling probe as mentioned in this paper is a novel realization of active plasma resonance spectroscopy (APRS) which can be miniaturized, and it can be flatly embedded into the chamber wall, thus enabling monitoring or control of a plasma process without perturbing it.
Investigation of the sheath effect on the resonance frequencies of a curling probe
Ali Arshadi,Ralf Peter Brinkmann +1 more
- 24 May 2015
TL;DR: In this paper, a thin sheath layer is built in the vicinity of the probe surface, which can change the resonance behavior of the curling probe, which is a recent innovative realization of active plasma resonance spectroscopy (APRS) concept.
Analytical investigation into the resonance frequencies of a curling probe
Ali Arshadi,Ralf Peter Brinkmann +1 more
TL;DR: In this article, the curling probe is modeled as an infinite slot-type resonator that is in direct contact with the plasmas and diffraction of an incident plane wave at the slot is calculated by solving the cold plasma model and Maxwell's equations simultaneously.