A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a carbonitride containing surface and process for manufacture thereof.

Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof

The present invention provides a coated cutting insert particularly useful for finishing operations in milling of grey cast iron. The invention is characterised by a fine-grained WC-Co cemented carbide body and a coating consisting of multiple layers of TiCxNy deposited at conditions aiming to minimize the decarburisation of the cutting edge without any negative effects on the substrate. The invention also relates to a method of applying a TiCxNy-layer by CVD-technique on a cemented carbide cutting insert without eta-phase formation and without etching of the binder phase.

Coated cutting insert

The present invention concerns a tungsten carbide base cutting tools formed on sintered hard alloy substrate material. Multiple hard coatings are deposited on the Co-enriched surface layers of the substrate material, and a maximum value of the Co concentration in a layer occurs within a distance of 50 μm of the external surface of the substrate material, and this surface layer region is referred to as the denuded zone because the surface region is substantially free of carbides, carbonitrides and nitrides of Ti, Ta, and Nb containing W. The multilayer coating consists of a primary coating of TiCN, a secondary coating of Al 2 O 3 and the surface coating consisting of at least one of TiCN and TiN. The interface between the substrate material and the primary coating is provided with a first intermediate coating consisting of TiN. The interface between the primary coating and the secondary coating is provided with a second intermediate coating consisting of at least one layer of TiC, TiCO and TiCNO.

Multilayer coated hard alloy cutting tool

An article includes a working portion including cemented carbide, and a heat sink portion in thermal communication with the working portion. The heat sink portion includes a heat sink material having a thermal conductivity greater than a thermal conductivity of the cemented carbide. Also disclosed are methods of making an article including a working portion comprising cemented carbide, and a heat sink portion in thermal communication with the working portion and including a heat sink material having a thermal conductivity that is greater than a thermal conductivity of the cemented carbide. The heat sink portion conducts heat from the working portion.

Articles having improved resistance to thermal cracking

A process for forming a titanium carbonitride coated stratified cobalt enriched cemented carbide cutting insert, said cemented carbide is comprised of more than 70 percent by weight tungsten carbide and has a matrix binder comprising cobalt with a cobalt enriched stratified surface. The process comprises chemically vapor depositing a layer of titanium carbonitride on said cemented carbide substrate by heating gaseous reactants comprising titanium chloride, methane, hydrogen, and nitrogen with an optimum methane/nitrogen ratio, under suitable conditions to form a titanium carbonitride coated insert having an eta phase in the cemented carbide substrate adjacent said titanium carbonitride coating. The eta phase comprises chemical compounds consisting essentially of cobalt, tungsten and carbon, and the titanium carbonitride surface is contacted with a carburizing gas for a sufficient time and at a sufficient temperature to convert substantially all of said eta phase to elemental cobalt and tungsten carbide.

Titanium carbonitride coated stratified substrate and cutting inserts made from the same

A coated body consisting of a substrate that can be decarburized during a carbide, nitride or carbonitride coating process comprising a first (innermost) carbon diffusion retarding coating of MetCO, MetCON, MetON adjacent to the substrate and a second (next innermost) wear resistant coating of MetC, MetN and/or MetCN, where Met is Ti, Hf, V, Zr, Si, B or other metals of subgroup 3-7 of the periodic table of the elements, or a mixture thereof. The intermediate coating has been found beneficial in order to reduce or even eliminate the formation of eta phase in the substrate.

Diffusion barrier coating material

Ueberzugsmaterial, das eine diffusionsbarriere bildet.

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Diffusion barrier coating material

Ueberzugsmaterial, das eine diffusionsbarriere bildet.