The invention provides a focus adjuster for laser beam machine which adjusts focus by detecting reflected light of a laser beam in a laser beam machine. A laser beam outputted from a laser oscillator device 550 is reflected by a mirror 570 via an output mirror 560 and introduced into a laser machining tool. The laser beam collected by a machining lens 62 is reflected by a reflector plate M1 and sensed by a reflection detector 580. Automatic focus adjustment is achieved by sensing output of the reflected light as well as changes in focal position due to contamination of the machining lens 62.

Focus adjuster for laser beam machine

PROBLEM TO BE SOLVED: To accurately process a micro machining in the order of nanometer. SOLUTION: The intensity of a reflected light from a work 110 which is irradiated with a femtosecond laser beam is detected with first and second optical detectors 67A and 67B, the intensity of a plasma light generated by abrasion is detected with a third optical detector 67C, a moving table 11 is controlled with a first controlling computer 61 so that the work 110 is fixed at a focus position on the basis of the detection outputs of the first and the second optical detectors 67A and 67B, a micro moving table 13, which finely moves the work 110 mounted on the moving table 11 in the direction of the optical axis of a condensing part 50 of the femtosecond laser beam, is so controlled with a second controlling computer 62 that the work 110 is fixed at a more accurate focus position with a minimum laser beam intensity given on the basis of the detected output of the third optical detector 67C, and the computer 62 controls a power controlling part 30 which controls the power of the femtosecond laser beam.

Micro machining device

The invention discloses a system for laser focus positioning. The system for the laser focus positioning comprises a laser device, a convergent lens, a material translation device. A laser beam output from the laser device incidents on the convergent lens and incidents on the surface of an optical material which is clamped on the material translation device after focalized. A plasma body bright spot is produced after the laser beam is focalized and a bright spot mirror image is formed by the bright spot through the surface of the optical material. A charge coupled device (CCD) micro imaging system which is used for simultaneously collecting and outputting the images of the plasma body bright spot and the bright spot mirror image is further arranged. The invention further discloses a method for positioning the optical material on a laser focus point. The method includes that after focalized and output, the laser beam produces the plasma body bright spot by adjusting the laser device and the like, the surface of the material is controlled to approach the plasma body bright spot until the bright spot mirror image is formed, the plasma body bright spot and the bright spot mirror image are enabled to enter a view field of the CCD micro imaging system until a complete registration of the plasma body bright spot and the bright spot mirror image is achieved. The system for the laser focus positioning and the method for positioning the material on the laser focus point have the advantages of being convenient to operate, high in positioning precision and small in artificial factor intervention and the like.

System for laser focus positioning and method for positioning material on laser focus point

PROBLEM TO BE SOLVED: To form V-grooves on the surface of a glass substrate by condensing pulse laser beams of a short pulse width to the outside of glass and locating the glass surface behind the beam-condensing point thereof (in the progressing direction of the laser beams) thereby giving rise to abrasion. SOLUTION: The V-grooves are formed on the surface 7 of the glass substrate 1 by irradiating the surface with the laser beams 2. The laser beams 2 are condensed to the upper side on the outer side of the glass substrate 1 at this time and the distance between the beam-condensing point 4 and the surface 7 of the glass substrate 1 is changed, by which the angle formed by both flanks of the V-grooves is changed. The range of the angles is from 30 to 120 deg.. The laser beams to be used are pulse beams and the pulse width thereof is preferably <=10 picoseconds.

Method for processing glass substrate

PROBLEM TO BE SOLVED: To provide a method for cutting a substrate using a femtosecond laser which generates no thermal expansion nor impulse wave in the periphery of a spot wherein the substrate is cut and thereby reduces wear and tear expenses SOLUTION: This method for cutting the substrate using the femtosecond laser comprises a step for arranging a substrate 100 on a stage and a step for projecting the femtosecond laser 201 to a portion to be cut of the substrate arranged on the stage and cutting the substrate COPYRIGHT: (C)2006,JPO&NCIPI

Method for cutting substrate using femtosecond laser

PROBLEM TO BE SOLVED: To correctly adjust a focus position against a workpiece irrespective of variation of a laser source and an optical path by detecting strength of plasma formed with the focused laser beams, and adjusting the focus position against a workpiece corresponding to the detected strength of plasma. SOLUTION: In this laser focusing device 100, a focus lens 106 focuses ultra short short pulse laser beams 104 generated by a laser 102 at a focus point with heightened laser power density, so as to form a plasma 108 at the focus point. The plasma 108 causes a plasma light emission 112, which is directed towards a light detector 116 (CCD camera) by a direction changing lens 114, and the light detector 116 detects strength of the plasma light emission 112. A controller 118 adjusts the focus point of the laser beam 104 against a workpiece 110 by adjusting one or both of a workpiece actuator 122 or a focus lens actuator 120 based on the strength of the plasma 108.

Method and device for focusing lasers

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Method and device for focusing lasers