In all of the actuating mechanisms for the precision positioning systems such as compliant, inertial, ultrasonic and inchworm, the lack of an integrated precision positioning system with high stroke and multi-axis operation is felt. In this paper, a state-of-the-art embedded two-axis inchworm piezomotor with an innovative operating principle is proposed. This piezomotor consists of two stages that are integrated, and each one delivers continuous motion in one axis. Each of the stages consists of three actuating parts: two clamping actuators to engage/disengage with the guideway or frame (depend on the stage), and one feeder actuator to provide the step-by-step motion. The mode shapes and Von Mises stress distribution for each stage are analysed by using the finite element analysis (FEA) method. The performance of each stage is then verified throughout the experimental tests. The experimental tests are carried out to realize the two-axis piezomotor characteristics such as step-pitch, resolution, axial speed, bearing capacity, and operating frequency in each stage.

https://iopscience.iop.org/article/10.1088/1361-665X/ab545e/pdf

A novel high performance integrated two-axis inchworm piezoelectric motor

The MEMS accelerometers play a pivotal role in the medical, automotive and smart phones industries. In this paper, a new approach to measure the acceleration by the capacitive MEMS accelerometer using the finite element analysis method is studied. This novel mechanism, which called the three-phase method, enhances the sensitivity of the accelerometer in comparison to the conventional two-phase measurement method and is capable of eliminating offsets and effects of manufacturing tolerances. In the two-phase method, there are generally only two capacitances between the rotor and stator electrodes of the accelerometer. These capacitors vary by applying the acceleration and relative displacement of the electrodes with a phase difference of 180. On the contrary, in the three-phase method, six variable capacitances vary with the phase difference of 120. In the latter approach, the sensitivity is twice of the two-phase approach, and also by adjusting the electrical phase angle, the manufacturing tolerances can be eliminated. The frequency response was investigated in this paper, which shows the ultra-low sensitivity of this accelerometer to the unwanted cross-sectional and rotational accelerations.

Performance Improvement of a Capacitive MEMS Accelerometer using Three Phase Sensing Approach

Nowadays, microelectromechanical (MEMS) accelerometers are diversely used in broad industrial fields due to their low power consumption as well as simple reading circuit and fabrication process. In this study, a MEMS-based piezoelectric microaccelerometer is presented with dramatically increased sensitivity that was achieved by creating a uniform stress distribution in its piezoelectric layer. As compared to other similar microaccelerometers, however, this microaccelerometer exhibits less cross-axis sensitivity. The frequency response and resonance modes of the proposed microaccelerometer were also studied, and its output characteristics determined. The Von Mises stress analysis showed that the proposed design does not fail within an acceleration range of ±45g. In addition, fatigue analysis showed that the proposed microaccelerometer was fatigue-proof when placed under a cyclic acceleration with an amplitude range of ±30g and was capable of withstanding more than 3 million cycles upon being exposed to an alternate acceleration with an amplitude range of ±45g.

Piezoelectric Cantilever Micro-accelerometer Sensitivity Enhancement using Uniform Stress Distribution

The new technologies of precise positioning systems with high speed and accuracy have been in the focus of attention in the recent years. In this research, a one-axis walker type inchworm piezomotor has been designed, modeled, manufactured and characterized. Simple design, simple manufacturing and assembly processes, low manufacturing cost and also high speed and stroke are advantages of this piezomotor. This system consists of three piezoelectric actuators, which installed into the clamps and feeder sets, and a guideway. The geometrical parameters with a high impact on the stiffness have been realized and modeled by the finite element method to ensure the proper functioning of the piezomotor. The motor dimensions are 55 × 23.1 × 15 mm3 which can provide a large movement range inside the guideway. The simulation analysis and experimental tests have been carried out to characterize the piezomotor. Based on the shape mode analysis, the maximum operating frequency of the piezomtor has been determined. Also, the Von-Mises stress analysis has been employed to predict the structural behavior of the motor. Finally, the experimental tests have been conducted to illustrate the piezomotor characteristics such as step pitch, speed, and operating frequency.

A Linear Inchworm Piezomotor with a New Configuration: Design Considerations, Fabrication and Characterization

Design and fabrication of the first micromachined accelerometer made from steel and the first MEMS accelerometer fabricated using micro-wire electrical discharge machining (μWEDM) process is presented in this paper. By utilizing this fabrication method, it is possible to achieve a huge proof mass that has a prominent effect on reducing noise. The proof mass in this design has a mass of 7.85 mg which leads to the Brownian noise of 0.8 μg/ Hz that is comparable to low noise MEMS accelerometers. Another advantage is the higher density of the steel relative to the silicon, so a heavier proof mass can be achieved in a smaller size, providing a better control over the damping. The finite element analysis of the accelerometer shows that this sensor is able to measure high-amplitude accelerations up to 131 g without the risk of failure and fatigue because of the high yield stress and fracture toughness of the steel. Consequently, due to its low noise, resulting from its heavy mass, and also the ability to measure high amplitude acceleration, resulting from the high yield stress, the fabricated accelerometer has a dynamic range of more than 100 dB. Experimental tests showed that the accelerometer has the sensitivity, nonlinearity and range of 18 mV/g, 3% and 100 g respectively. This sensor provides the ability to operate in the air, which makes the packaging process easier. Also, the accelerometer shows the cross axis sensitivity of 0.44% accruing from the symmetrical arrangement of suspension beams used to suspend the proof mass.

A novel single axis capacitive MEMS accelerometer with double-sided suspension beams fabricated using μWEDM

The Micro wire electrical discharge machining (Micro wire-EDM) process is a modern machining process with various applications in manufacturing micro-parts. The recast layer remaining on the machined surfaces is an inevitable complication of this process. This layer can subsequently affect the machined parts performance. To optimize the recast layer in the micro wire-EDM of the molybdenum microparts, effect of the process parameters on the distribution amplitude of the recast layer was investigated using the Taguchi method. The obtained results showed that the optimal levels of the micro wire-EDM process parameters for achieving the optimal distribution amplitude of the recast layer are as follows: spark pulse-on time of 0.2 μs, cutting speed of 7 mm/min, process voltage of 17 V, and wire tension of 0.45 kg. Also the importance order of the effect of the process parameters on the distribution amplitude of recast layer is as follows: spark pulse-on time, process voltage, cutting speed, and wire tension.

http://admt.iaumajlesi.ac.ir/article_535008_ca5bd7649d7bc6fd10d5982fc0559d28.pdf

Effect of the Micro Wire-EDM Process Parameters on the Recast Layer in the Molybdenum Micromachining

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Effect of the Micro Wire-EDM Process Parameters on the Recast Layer in the Molybdenum Micromachining