Micromechanical gyroscope is one of the important applications of attitude control platform and inertial navigation system. However, domestic gyroscope research and development is not highly integrated at present, and the main research focuses on the design of micro-gyroscope with a single detection axis (especially z-axis detection). In order to realize the monolithic triaxial gyro which can be used in the field of intelligent ammunition, a wheel ring gyro structure is designed. The gyro structure was modeled on the SolidWorks software, and then modal analysis, transient impact response analysis and harmonic response analysis were carried out in the finite element analysis software ANSYS respectively. According to the natural frequency of each mode, the structure size of the gyroscope is optimized. Through the simulation results, it is observed that the frequency split between the working modes is relatively small, and the structure has high mechanical sensitivity. The transient impact simulation of the gyro structure shows that the maximum stress of the sensitive structure under the impact of 10000g@5ms is 394.34Mpa, which proves that the structure has good impact resistance.

Structural Design and Simulation Analysis of Silicon Micro Triaxial Wheel-ring Gyroscope

Spurious modes suppression to retain the purity of the main resonance in lateral-extensional contour modes is one of the most important requirements for commercializing vibrating RF MEMS resonators. This issue becomes much more critical for ring-shaped micromechanical resonators that are normally susceptible to both out-of-plane flexural modes and in-plane torsional modes at frequencies adjacent to that of the desired lateral-extensional mode. However, this kind of lateral-extensional mode resonators hold unique ability to achieve GHz frequencies without excessive scaling of its key dimensions, such as inner and outer radius, to facilitate strong electromechanical coupling coefficient by either capacitive or piezoelectric transducers while exhibiting high Q’s on the orders of a few thousands. This paper presents a new type of ring resonators based on a hollow ellipsoid structure operating in the extensional wine-glass mode. Due to the mode shape matching to the resonator body shape, vibration amplitude at this strategically-designed mode becomes much larger than those for other modes. Moreover, a harmonic analysis to verify the basic design principles and further discussions towards design optimization have been presented.

Design of spurious mode-free elliptical ring resonators

Micro-sized components have been widely used to microelectromechanical systems (MEMSs) and medical apparatus in recent years. Measurement methodologies of the mechanical property of small materials need to be improved for structural designing of these devices because of their component size reduced to microor nano-regime where sample size effects emerge. Mechanical properties and deformation behavior could be very different with their dimensions and geometries especially for small materials. Our experiments on the micro-specimen tested in different dimensions and loading directions are suitable for the evaluations of materials for MEMS components. In this chapter, recent studies on micro-testing of bending, compression, and tension with micro-sized samples will be presented including fabrication methods of non-tapered micro-sized specimens.

/pdf/evaluation-methods-of-mechanical-properties-of-micro-sized-fjcvdomp5a.pdf

Evaluation Methods of Mechanical Properties of Micro-Sized Specimens

This paper presents a new type of three-axis gyroscope. The gyroscope comprises two independent parts, which are nested to further reduce the structure volume. The capacitive drive was adopted. The motion equation, capacitance design, and spring design of a three-axis gyroscope were introduced, and the corresponding formulas were derived. Furthermore, the X/Y driving frequency of the gyroscope was 5954.8 Hz, the Y-axis detection frequency was 5774.5 Hz, and the X-axis detection frequency was 6030.5 Hz, as determined by the finite element simulation method. The Z-axis driving frequency was 10,728 Hz, and the Z-axis sensing frequency was 10,725 Hz. The MEMS gyroscope’s Z-axis driving mode and the sensing mode’s frequency were slightly mismatched, so the gyroscope demonstrated a larger bandwidth and higher Z-axis mechanical sensitivity. In addition, the structure also has good Z-axis impact resistance. The transient impact simulation of the gyroscope structure showed that the maximum stress of the sensitive structure under the impact of 10,000 g@5 ms was 300.18 Mpa. The gyroscope was produced by etching silicon wafers in DRIE mode to obtain a high aspect ratio structure, tightly connected to the glass substrate by silicon/glass anode bonding technology.

/pdf/design-and-fabrication-of-a-novel-wheel-ring-triaxial-1m3aiosd.pdf

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Analog-CMDA based interfaces for MEMS gyroscopes

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Analog-CMDA based interfaces for MEMS gyroscopes