The experimental conditions required for charge compensation in depth profiling of polymer foils have been investigated with reference to the analysis of negative secondary ions. Low energy (≤500 eV) electron beams were employed in combination with 8 keV Xe+ ion beams. The minimum electron current required for the appearance of a stable SIMS signal was found to be equal to the ion current. Optimum SIMS signals were achieved by sufficiently overcompensating the primary ion current. Signals due to electron stimulated desorption could be suppressed by appropriate adjustment of the target bias. Reproducible depth profiles were obtained without major difficulties.

Charge compensation in SIMS analysis of polymer foils using negative secondary ions

We reported in the SIMS IV conference establishment of a measurement condition for the analysis of low concentration elements within an organic polymer matrix [1]. Prevention of charge-up by gold coating, dynamic SIMS conditions with O2+ and Cs+ primary ions to suppress molecular ions background and also to attain sensitivity and good depth resolution, were undertaken.

Application of SIMS Technique to Industrially Used Organic Materials

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Application of SIMS Technique to Industrially Used Organic Materials